VFR

Symbol 02 2 stations A, B P , EA, EB Symbol 04 06 Passage Porting specifications (A, B) EA, EB P 10 10 stations 1 2 Symbol 3 4 3 4 1 Side 2 Bottom M Mixed Common Common For bottom ported: 1/2 only.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Y ellow Black Connection of shield material [Robotic cable with lock and sensor for servo motor (24 VDC)] LE-CA-l-B LE CA 1 B Controller side Actuator side (Terminal no.)

ZP

ZPT2004U ZPT10UT 2 2 2.6 1.2 10 1.2 0.3 11 4 2.6 4.6 1 ZPT04U-B-A8 ZPT3507U ZPT13UT 4 3.5 4.8 1.8 13 1.6 0.8 0.5 14 7 4.3 7.8 1.5 ZPT06U-B-A8 ZPT4010U ZPT16UT 6 4 7 2 16 0.8 17 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82

Vacuum Pad

28 43 20.5 32 13 50 52 36 54 24 35.5 16.5 ZPT HB-B (Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12

Vacuum Pad

28 43 20.5 32 13 50 52 36 54 24 35.5 16.5 ZPT HB-B (Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12

Vacuum Pad

28 43 20.5 32 13 50 52 36 54 24 35.5 16.5 ZPT HB-B (Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12

Vacuum Pad

28 43 20.5 32 13 50 52 36 54 24 35.5 16.5 ZPT HB-B (Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 396 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Non Plug-in Stations 10-SS5Z3-60D [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 25 13.3 13.3 25 (Pitch) P = 10.5 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE

Table of Contents

Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 (mm) Bracket mounting size Accessory specifications With auto-drain Standard specifications Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14 18 20 24 24 B 67 97 129 165 169

LEC-OM02704CN

[0][0]0) OFFONCC-Link 14 39 14 14.5.9 (1) 0()5( 6) (a) [3][3][1][0][1][5]14.4.1 (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][3][2][0][2][5] 14.4.1 (b) 10 16 10 01F5501 (3) [8][2][2][0] [8][2] [2][0] 1EA5 14 40 14 14.5.10 (1) (a) [0][2][0][0] [0][2] [0][0] (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][5][8][0][8][E] 14.4.1 (b) 0 0 32bit 16 () 0 10 1 16 0 11 22

V

20 2~16 H 10 2~8 24VDC 12V 12 VDC * Mixed Porting Available by Special Order SUP/EXH B L O C K A S S E M B LY M O U N T I N G P O S I T I O N S U U Side 2 ~ 10 Stations D D Side 2 ~ 10 Stations B Both Sides 2 ~ 20 Stations *M Special Specifications (by Special Order) C O N N E C T O R M O U N T I N G P O S I T I O N U U Side D D Side V A LV E S TAT I O N S (BLANKING PLATE ASSEMBLY ARE INCLUDED

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

AC Servo Motor Driver (CC-Link Type ）

App. 40 APPENDIX Recommended Parameter Values [LESYH] LESYH16 LESYH16D LESYH25 LESYH25D Lead symbol A B A B A B A B 16(20) 8(10) Series Lead (Pulley (Pulley (Including pulley 10 6 10 6 16 8 ratio ratio ratio) 5/4) 5/4) Para. Initial value Recommended value Parameter *1,*2 No.

Modular F.R.L. Units

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

One-touch Fittings

. port size Weight [g] a b 4 6 KQ2N04-06 38 13.3 13.3 2.5 2 6 8 KQ2N06-08 42 14.2 13.3 4 2 8 10 KQ2N08-10 47 15.6 14.2 6 2 10 12 KQ2N10-12 51 17 15.6 7.5 3.1 12 16 KQ2N12-16 55 20.6 17 9 4.9 Applicable fitting a Color Cap: KQ2C Applicable tubing O.D.

MY1

B A 10 16 20 Mounting position A 31 24 39 B 129 86 161 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A Mounting position 10 16 20 A 31 24 39 B 129 86 161

ISO Cylinder

A B A B A B A B A B A B 32 11.5 10.5 7.5 6.5 8 (6) 7 (5) 8.5 (6.5) 7.5 (5.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (4) 5 (3) 40 17.5 15.5 13.5 11.5 14 (11) 12 (9) 14.5 (11.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 12 (9) 10 (7) * The value in ( ) is for air cushion. * The above mentioned value is a guide for auto switch mounting positions for stroke end detection.

CV/MVGQ

Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no.

CV/MVGQ

Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l