Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

8 13 IFl M5 X 0.8, depth 5 Reference dimensions after thread installation M5 10 19 22 Width across flats 10 Gasket (Accessory) M5 X 0.8 13 R06 10 A 30 6 reducer Applicable fitting A 16 13 14.5 16 KQ 06-M5 H L T S Y Other series KQ, KS 13 KJ Series KJ (-X20) Series 3.1-4 Pressure Sensor For General Purpose Fluid Applications Series PSE520 How to Order PSE52 0 Operating pressure Porting High

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Universal Metric size 04 06 08 10 12 Inch size 01 KE 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 AS-FG With One-touch fitting AS-FP AS-FM M5 Port size AS-D AS-D M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 AS-T ASP Caution U10/32 N01 N02 N03 N04 ASN Be sure to read this before handling the products.

LX

D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates.

AS-FG/ASD-FG

Type 3 Universal Applicable tube outside diameter Metric size Inch size With One-touch fitting 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Stainless steel specification (SUS303) Thread type Nil Metric threads (M5) Unified threads (10-32UNF) R(PT) NPT Port size M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 N Needle Valve/Flow Rate Characteristics

Electric Actuator/Slider Type

20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 23 Actuator specications Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3,000 Positioning repeatability [mm] 0.02 Lead [mm] 10 5 12 6 16 8 20 10 Impact/Vibration resistance [m/s2] Note 3) 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature

smcmaintenancepartslist

Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) MXS6 MXQ6 0.5 0.5 M2.5 x 6 M2.5 x 6 MXS8 MXQ8 0.9 0.9 M3 x 6 M3 x 6 MXS12 MXQ12 2.1 2.1 M4 x 10 M4 x 8 MXS16 MXQ16 M5 x 12 M5 x 10 4.3 4.3 MXS20 MXQ20 M5 x 14 M5 x 16 MXS25 MXQ25 M6 x 18 6.9 M6 x 16 6.9 A level difference is set to t No level difference with a

42

Bottom 1/2 SYJ S kit 12 stations SZ n: Stations VF Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 C [dm3/(sbar)] 11 11 11 VQ 1/2 1 4/2 (P A/B) b 0.24 0.24 0.24 2-position metal seal VQ51 2 00 Cv 2.7 2.7 2.7 VQ 4/5 VQ 4/5 C [dm3/(sbar)] 12 12 12 b 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) VQC 1/2 Cv

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size With One-touch fitting 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 Stainless steel specifications (SUS303) AS Thread type ASP Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230FG ASD330FG ASD430FG

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

ITV

Made RP13A-12RB-13PA (71) 20 8.5 (14.3) (14.3) 11 ARJ 9 Digital pressure display Digital pressure display AR425 to 935 M5 x 0.8 Solenoid valve EXH M5 x 0.8 Solenoid valve EXH ARX 120 12 120 12 Solenoid valve EXH Solenoid valve EXH 19 13.5 19 13.5 AMR ARM EXH (3) EXH (3) SUP OUT SUP OUT 10 10 ARP IR CC-Link/ITV200-CC DeviceNet/ITV200-DE IN M12 x 1 Communication cable connection thread (Plug

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA

CL

12 11 12 84 94 95 103 12 14 18 8 10 12 16 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 18 22 22 30 15.5 19.5 19.5 27 20 25 32 40 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 6 8 10 14 4 5 5.5 6 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW

LX

D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates.