VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CG1

10 10 10 12 12 12 13 2 2 2 2 12 14 18 25 1/8 1/8 1/8 1/8 8 10 12 16 24 29 35.5 44 14 16.5 20 26 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 13 17 17 19 6 8 10 14 18 22 22 30 15.5 19.5 19.5 27 M4 Depth 7 M5 Depth 7.5 M5 Depth 8 M6 Depth 12 S 1 to 50st 51 to 100st 101 to 125st 126 to 200st Bore (mm) 20 25 32 40 TA TB TC ZZ 211 213 230 ZZ 181 186 188 205 S 144 144 146 153 ZZ 156 161 163 180 S 119 119

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

Free Mount Cylinder for Vacuum Series ZCUK

Proper Tightening Torque Hexagon socket head bolt diameter (mm) M3 M4 M5 M6 Bore size (mm) Proper tightening torque (Nm) 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% 1251 Series ZCUK Standard Stroke Mounting Stroke (mm) Double acting style/Single rod type/Non-rotating rod Applicable cylinder Stroke (mm) Vertical mounting (Body through-hole) Bore size (mm) 10 16 20 25 32 5 10 15

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Valve Single Unit

Purchasing order is available in units of 10 pieces.

KA

(mm) <M5, M6> <M5, M6> A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

LX

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

Air Cylinder

Bore size A1 H MM ZZ 20 8 10 M4 x 0.7 86 25 8 10 M5 x 0.8 86 32 12 10 M6 x 1 88 40 13 10 M8 x 1.25 114 H ZZ + Stroke (mm) DBore size Stroke range A AL B1 F FF FX GA GB H H1 I KB MM N ND P S ZZ 20 1 to 150 18 15.5 13 30.4 M5 x 0.8 depth 9 22 22 8 27 5 28 8.2 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 10.2 M10 x 1.25 30 26 0 0.033 1/8 76

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

SZ3000

They can be ordered in multiples of 10 pieces.

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

: One-touch fitting for 4 C6: One-touch fitting for 6 10 10 (2) M5: M5 thread 53 13.8 6 A 2 10 16 4.3 2-3.2 mounting hole 24.5 7.8 (For C3, C4, C6) (For M5: 5.7) Manual override Cover dia. 1.6 Cross section 0.34 mm2 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

0.55

Tightening Torque of Mounting Screw Symbol 1 2 VP344 1/8 1/4 VP544 1/4 3/8 VP744 3/8 1/2 9 Gasket HNBR VP700-217-1 VP300-217-1 VP500-217-1 VP300-202-l VP700-202-l VP500-202-l 10 Sub-plate Aluminum die-casted M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm Hexagon socket head bolt (1 pc.)

SMC Pneumatic Clean Series

Nil S n No D With auto switch (Built-in magnet) Model Cushion Action Standard stroke (mm) Auto Switch Mounting Tube Bore size (mm) 6 10 16 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CJ26 10-/21-CJ210 10-/21-CJ216 11-/22-CJ26 11-/22-CJ210 11-/22-CJ216 Relief type Vacuum suction type 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Band mounting only Except 6 M5 x 0.8 15, 30,

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

KA

Soft nylon Polyurethane KAT23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 8 8 8 15.5 19.5 21 3.4 2.9 9 3.2 17.5 1 8 KAT23-M6 KAT23-U01 10 10 15.5 KAT04-M5 M5 X 0.8 M6 X 1.0 8 17 6 4.3 4.3 8 KAT04-M6 16 10.4 16 18 4 1 8 20 KAT04-U01 6.0 6.0 9 14 10 10 21.5 1 4 KAT04-U02 22 15 16 KAT06-M5 M5 X 0.8 M6 X 1.0 18 4.3 4.3 8 7 8 KAT06-M6 16.5 17 1 8 20 3 8 KAT06-U03 24 23 21.5 14 12.8 KAT06-U01 10 10 6 23.5