Water-cooledThermo-chiller

Outlet pressure [60 Hz] 75 75 60 60 Outlet pressure [50 Hz] 45 45 30 30 Return port pressure Return port pressure 15 15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Environment

Nil Without cable 2 2 5 5 A 10 !

XM, XY

-6 up to atmospheric pressure Operating pressure (Pa)(abs) Conductance (L/s) Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24 0.26 0.28 0.05 KF (NW)

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Low torque Metal seal type Rotary joint

P = 8.2 29 8.2 x 7 = 57.4 P = 8.2 4 3 105 15 *5 5 6 7 8 7.5 4.5 25H8 (10) 5.5 (10) 30H8 45 45 1 2 3 1 12 P=45 8 P=30 2 11 4 7 10 3 22.5 5 6 6 7 8 9 4 5 4-M3 x 0.5 thread length 8 P.C.D.48 51 46 2-M4 x 0.7 thread length 8 P.C.D.43 Mounting Brackets/Flanges MQR2-F MQR4-F 2-8 counter bore depth 3 2-4.2 through P.C.D.38 4-3.5 drill through 17 drill through 4-3.5 through 22 drill through 2-3.2

Series AP3100

45 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 1.0 (25.4) 1.0 (25.4) AP3650 AP3657 1.88 (47.8) 0.44 (11.2) 3.02 (76.7) 0.13 (3.3) 0.4 (10.2) 1.87 (47.5) A B B 0.44 (11.2) 3.6 (91.4) 45 1.0 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) A B B Connections A B inch inch (mm) (mm) FV4 MV4 TW4 FV6 MV6 TW6 FV4 MV4 TW4 FV6 MV6 TW6 Material

LVQ

7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

AS

M Mass (g) 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 27.9 28.2 29.6 32.4 40.2 32.5 33.1 36.4 44.5 37.9 41.0 43.3 44.3 37.9

SYJ300/500/700

N.O. 10-SYJ722M 10-SYJ714M 140(80) 1/8 Base mounted (With sub-plate) 10-SYJ724M 135(75) 136(76) 157(97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC.

ZP

Thin flat Thin flat with ribs Table (2) Pad Diameter/Stroke Diameter (mm) Thin flat/Thin flat with ribs Stroke(mm) 2 8 3.5 x 7 4 x 10 4 6 10 13 16 20 25 32 40 50 2 x 4 13 16 10 6 10 15 20 25 30 50 40 Table (3) Vacuum Entry/Mounting Thread Diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 Thin section series 10 to 16 10 to 32 40, 50 Symbol Thread dia.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Rotary Actuator/Vane Style Series CRB2

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Series CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63,80,100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P211070-13.

5 Port Air Operated Valve

SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 2B 2B VZA (1.6) 66 23 19 81 VFA VFA 71 (6) 1/8 [Pilot port: Lateral (-P)] VFRA 1/8 [Pilot port: Lateral (-P)] VPA4 (45) (55) 31.5 31.5 36 36 SYJA 35 17.5 17.5 7 7 VZA 20.5 2 x 4.2 (For mounting) 20.3 20.5 2 x 4.2 (For mounting) (16) 2 x 5.5 VTA (For mounting) (26) 1/8, 1/4 [1(P)port] (18.4) 1/8,

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

5 Port Solenoid Valve

NAS100-73) for details. 020 EX9 AC EN Cable length (L) Connector specification M12 plug (straight) RJ-45 connector PSRJ 010 020 030 050 100 1000 [mm] 2000 [mm] 3000 [mm] 5000 [mm] 10 [mm] 6.7 M12 RJ-45 47.3 45 L Core wire colors Terminal Terminal no. 1 2 3 4 5 6 7 8 2 1 no.