Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 5 3.5 32 + Stroke 15.5 35.5 + Stroke 25 16 Lead wire minimum bending radius 10 Auto switch 17.5 5 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 3.5 through 38 8 20 29 0.5 Flat washer 6 10 4 4 20 32 + Stroke 3.5 29 35.5 + Stroke 20 Lead wire minimum bending radius 10 Auto switch 18 5.5 2 x

LEKF-OMZ0035

-V 200 to 230 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -10- 2.3 Construction LEKFS Motor : In-line (AC servo motor) Component Parts No.

PC Wiring System Series PCW

Compatible PLC Manufacturers Input 32 points Input 32 points Output 64 points OMRON Corporation Mitsubishi Electric Corporation Fuji Electric Co., Ltd. Hitachi Ltd.

Air Fittings Fitting Series For Special Environment

(mm) Effective orifice(mm 2) A D1 D2 L1 L2 1 8 KRL06-02S KRL06-01S 12.8 10.8 33.8 13.9 21.9 35.9 26.3 27.3 37.3 10 27.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 1 4 10 22 6 31 29.5 19 5.0 14 17 12 14 17 16.8 3 8 1 8 KRL06-03S 30 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 32 33.5 34.4 35.4 36.9 8 19.2 12 25 20.5 14.9 17 23.3 10 17 28.5 23 25.0

PFA/PFW

-m-m PFA750-m-m Dry air, N2 Heater type 1 to 10l/min (0.04 to 0.35SCFM) 0.1l/min (0.004SCFM) 5 to 50l/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Soft Start-up Valve AV2000/3000/4000/5000 1

42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Parallel l/O Connector . 32 6.1 Parallel I/O specifications . 32 6.2 Parallel I/O type (NPN/ PNP type) . 32 (1) Parallel I/O input circuit (same for both NPN and PNP type) . 32 (2) Parallel I/O output circuit . 32 6.3 The parallel I/O signal is detailed . 33 6.4 Parallel I/O Wiring Example. 38 7.

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

7

13 10 30 14 3 x Rc3/8 (Piping port) 77.5 3 x Rc3/8 (Piping port) 43 10 27 45 45 Width across flats 100 M24 x 1.5 44 112 30 Max. 65 Max. 65 50 52 Hole: 18 +0.027 0 Width across flats 24 R24 Shaft: 18 0.050 0.093 28 +0.5 +0.1 4 x M6 Thread depth 12 61 129 + Stroke 110 85 259 + Stroke Hole: 18 +0.027 0 2 x M6 Thread depth 6 Shaft: 18 0.050 0.093 Press-fit spring pin 5 x 40 L 38 17 32 37 48

Digital Flow Switch (Integrated display type) ( compatible)

^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting AC_E_G (Setting G of the accumulated

Fieldbus system PROFIBUS DP compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Sets the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

FREE MOUNT CYLINDER

OUT 28. 3 4. 99 10. 7 16. 3 3 6 3. 5 IN OUT 78. 5 16. 7 32. 4 48. 1 10 4 6. 9 IN OUT 201 45. 6 86.3 126 16 6 15 IN OUT 314 73 136 199 20 8 21 IN OUT 491 119 218 316 25 10 28 IN OUT 804 207 368 529 32 IN 12 34 Note) Prevent load from being applied to the piston rod when the piston rod is being retracted. d) Spring extended type [C(D)U(K)*-*T] (N ) Operating pressure Mpa Pressure receiving

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

AC Servo Motor Driver (SSCNET /H Type)

Refer to LECSS2-T Operation Manual,section 3.5 for input/output signal details. -10- 3.3.2 Source Sink I/O interfaces Connection example An example wiring diagram for Sink I/O is shown below Driver Servo amplifier () CN8 (Note 16) Short-circuit connector (Packed with the servo amplifier) 10 m or less driver) (Note 12) CN3 10 m or less 24 V DC (Note 10) 3 DOCOM (Note 15) Main circuit power

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV220F-U10/32-03 ASV220F-U10/32-07 5/32" 1/4" 10-32 UNF 10-32 UNF 8 8 9.3 12 9.6 9.6 22.8 23.6 27.6 28.4 11.1 11.1 31.4 31.4 28.6 28.6 27.7 27.7 24.9 24.9 12.7 13.7 8 9 Reference U10/32 thread dimensions after installation.