Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

LEH_C

2) SETON 3) 1.() INP ON, 3) 2 (8mm3mm) 5 - AREA 1 8 INP 100 8 () AREA 3 INP 100 3 () AREA 0.9 INP 1() 0.99. 99 OUT* 2) 1) ON OFF 2) DRIVEON OUT* DRIVEOFF IN* OUT*OUT*OFF OUT(LEC ) 5.4 (LEC ) (LEC ) () ID 1 164 1) IO 1: 64 1 S 0 (+) 1000.00 (-) -1000.00 /: 2,000 Max.2000 0.50 1.00LEHZ(J),LEHF 0.00 LEHS 2) 100 40100 1:+ 1:+2: SW 2: /12 6 - W 1 0.00 W 2 0.00 0.00 1

EXxx-OMV0017-D

byte fixed EXW1-RDYNE4#: 0 points / 0 byte fixed a) Input size* 16 points / 2 byte 16 points / 2 byte Available EXW1-RDYNE4# / EXW1-RDM#E3#: 16 points / 2 byte fixed EXW1-RDXNE4#: 0 points / 0 byte fixed Output size (includes valves)* b) 16 points / 2 byte 16 points / 2 byte Available c) Wireless signal Active / Idle Active Available If set to "Idle", the wireless communication is disconnected

CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

AMX-OM-L023_e

D . ) , 2. 8 m or l ess ( overal l l engt h) I N N o back f l ow Pl ace w here ai r f l ow s backw ards El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L o P Q Z Rem ove f our hexagon socket head bol t . Repl ace el em ent , gasket , ori ng. Ti ght en hexagon socket head bol t .

AC Servo Motor Driver (SSCNET Type)

(Note 6) SSCNET cable (option) 10k Plate SD 2m Max CN1A SW1 (Note 8) SW2 CN1B 2 1 (Note 1) Between electrodes MR-J3-B LECSS-S (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 MR-J3-B (Note 7) LECSS-S (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

AMX-OM-L022_e

D . ) , 2. 8 m or l ess ( overal l l engt h) I N N o back f l ow Pl ace w here ai r f l ow s backw ards El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L o P Q Z Rem ove f our hexagon socket head bol t . Repl ace el em ent , gasket , ori ng. Ti ght en hexagon socket head bol t .

AMX-OM-L021_e

D . ) , 2. 8 m or l ess ( overal l l engt h) I N N o back f l ow Pl ace w here ai r f l ow s backw ards El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L o P Q Z Rem ove f our hexagon socket head bol t . Repl ace el em ent , gasket , ori ng. Ti ght en hexagon socket head bol t .

IDX-OM-W037

Thermo-dryer 2.

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Threaded port only Thread type Nil F N T Rc G NPT NPTF 2 to 4 2 0 1 A VNB 15A Air operated External pilot solenoid 2 VNB 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Valve size Valve type Port size Rated voltage Electrical entry: D or DZ only Symbol Manual override Orifice dia.

Digital Pressure Switch

for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function

ZL3-OM00601

No.ZL3-OM00601-B 2.

DOC1023126

item. *2 Latest version of the configuration software must be used.

LFE-OMZ0011

Pin description 4 2 1 DC(+) 2 OUT2 1 3 DC (-) Connector on the body 4 OUT1 Connector pin numbers (male connector) 3 4 2 No.

SI unit for DeviceNet ®

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Current consumption 15mA or less Accuracy +/-2%F.S.