Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Thermo-chiller

Product side 7 3 Facility water outlet (For water-cooled refrigeration) Facility water equipment 7 3 3 Facility water inlet (For water-cooled refrigeration) 8 5 Customer system side 3 Circulating fluid return port 3 3 4 Oscillator 7 Circulating fluid outlet 1 6 4 CH1 7 2 Optical system 4 CH2 10 Automatic fluid fill port (For automatic fluid fill set) Fluid supply 9 Overflow port (For automatic

JXCx-OMT0062

SV.00 (1) (4) (10) (9) (5) (6) ARX830007 3 (7) Label of Controller version Example) SV2.07-1.00 (8) (11) A Side No.

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS AS12l1FG-M5 AS13l1FG-M5 M5 x 0.8 Gasket seal Note 3) AS-FE AS12l1FG-U10/32 AS13l1FG-U10/32 10-32UNF Note 3) KE AS22l1FG-l01 AS23l1FG-l01 1/8 Note 3) AS22l1FG-l02 AS23l1FG-l02 1/4 Note 3) Note 3) AS-FG AS-FG R NPT Note 1) Sealant AS32l1FG-l02 AS33l1FG-l02

VQ7-6/7-8

Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Large Size Vacuum Module: Series ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Nil 0.6 m 3 m 5 m Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. 30 50 Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc.

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

Environment

3 !

SFOD-OMT0010

Product Outline . 7 2.1 Features . 7 2.2 How to Order . 8 2.3 Product configuration . 9 3. Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.

48

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED.

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-14AN-10 3 pcs. Example) Lead wire length 1000mm VQ1170-5LO-C63 pcs. AXT661-14A-10 3 pcs. Example) Lead wire length 1000mm Connector ass'y No. (DC) Connector ass'y No. Double No. Double No. Lead wire length Single/3 position No. AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

3 Port Air Operated Valve Series SYJA300

: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A, R port) M5 x 0.8 23 5-4-5 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With

CUJ

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Operating piston speed (m/s) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 Allowable kinetic energy (J) 10 6 8 10 1 Load weight kg 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 22 Series CUJ Specific Product Precautions

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

300 103.5 23.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 SY 3 R3 2 4 SYJ 22 10 SMC SMC 5 1 3 Manual override Cover diameter 1.6 Cross section 0.34mm2 SX 42 36 3 VK VZ VF M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) VFR VP7 46.5 VP4 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE

VCC

Cleaning valve with gate valve Mountable number In this case, four (4) cleaning valves (including gate valve) 2 port valve Mountable number In this case, six (6) 2 port valves 3 port valve Mountable number In this case, ten (10) 3 port valves Stations 2 1 1 3 5 1 3 5 7 9 Pilot port fitting IN port OUT port D side U side IN port RETURN port Stations 3 Gate 2 4 6 2 4 8 6 10 Cleaning unit

SMC Wireless System PROFINET compatible

ms or less (the input connected to the base) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the input connected to the remote) 3 Analogue input/output 10 ms or less (the output connected to the base) Input/Output specifications DA refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the output connected to the remote) 3 Output type Source/PNP (-COM) Sink/NPN (+COM) Number of outputs Max. 32 points

VZ3000

3-3-7.