Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

[UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply. 50 50 to to 1000 1000 * Refer to the applicable stroke table. y Motor option Nil Without option B With lock Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

AP500

pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

ASP

3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

AZ1000

code HF Code psig/bar unit MPa unit Surface finish No gauge port No code Seat material Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Code No pressure gauge (Connections: 1/4 inch face seal male) 0 Code Material PCTFE (Standard) Vespel 3) PTFE 4) 5) No code Q No code VS TF -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Fluoropolymer Fittings LQ series 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 20C 100C 200C 260C 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

MY1B

Bore size (mm) Maximum manufacturable stroke (mm) Standard stroke (mm) Symbol Specifications 10, 16 3000 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 XB11 Long stroke type 20, 25, 32, 40 50, 63, 80, 100 XC67 NBR rubber lining in dust seal band 5000 X168 Helical insert thread specifications Strokes are manufacturable in 1 mm increments, up to the maximum stroke

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Cylinder stroke (mm) Port thread type Maximum manufacturable stroke (mm) Bore size (mm) Bore size 16, 20 Symbol Type M thread Rc NPT G Standard stroke (mm) Nil 25, 32, 40, 50, 63 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 TN TF 16, 20, 25, 32 40, 50, 63 Piping The stroke can be manufactured up to the maximum stroke from 1 mm stroke in 1 mm increments

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

Applicable Stroke Table Compatible Controllers KStandard/K Produced upon receipt of order Stroke Model LEL25 100 200 600 700 800 900 300 400 500 Step data input type Programless type 1000 K K K K K K K K K K The actuator and controller are sold as a package. Type (Controller Page 13) Confirm that the combination of the controller and the actuator is correct.

Refrigerant R134a (HFC) Series IDH 

Refrigerant R134a (HFC) Series IDH RoHS How to Order 10 IDH 6 For use in -DSDQ For use in Europe and Southeast Asia 23 IDHA 6 Option Size Nil E None (Standard) Auto drain normally closed Air compressor size 3.7 kW 5.5 kW Size Rated air flow capacity 4 6 14.1 scfm (400 L/min [ANR]) 21.2 scfm (600 L/min [ANR]) Combination of built-in products Voltage Filter (AME) Filter (AMH) Regulator Symbol

Cylinder with Turntable ø63, ø80, ø100 Series MGT

The in-line electrical entry type cannot be mounted. 451 Series MGT Specifications Bore size (mm) 63 80 100 Action Double acting Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.1 MPa Ambient & fluid temperatures 10 to 60C (No freezing) Piston speed 50 to 400 mm/s Cushion Rubber bumper on both ends Lubrication Non-lube +1.5 0 mm Stroke length

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Mass (g) Standard stroke (mm) End lock additional mass Model D25 52 138 186 350 487 918 1,420 5 36 10 40 15 44 20 48 30 56 50 157 222 400 547 1,000 1,533 75 175 258 450 608 1,083 1,645 100 194 294 500 669 1,165 1,758 125 549 729 1,247 1,870 150 599 790 1,330 1,983 175 649 851 1,412 2,095 200 699 912 1,495 2,208 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 29 34 42 55 90 133 -X Bore size (

AP10PA

No gauge port Ports No code No code M V X No pressure gauge (Connections: 1/4 inch face seal male) Code Ports 2 ports 3 ports 4 ports 0 2PW 3PW 4PW V3 L 1 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig Porting Configuration

2 Shock Absorber Series RB Specifications Model RB0805 RB0806 RB1006 RB1007 RB1411 RB1412 RB2015 RB2725 Basic type

/s) 0.05 to 5.0 Max. operating frequency (cycle/min) 80 80 70 70 45 45 25 10 245 245 422 422 814 814 1961 2942 Max. allowable thrust (N) 10 to 80 (No freezing) Ambient temperature range (C) 1.96 1.96 4.22 4.22 6.86 6.86 8.34 8.83 Extended Spring force (N) 3.83 4.22 6.18 6.86 15.30 15.98 20.50 20.01 Retracted 15 15 23 23 65 65 150 350 Basic type With cap Weight (g) 16 16 25 25 70 70 165 400

Clean Air Filter SFD Series

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.