less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.24 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ valve, 4/5 PORT SOLENOID VALVE, 1.25 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.24 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb

(swivel elbow -5 to 150°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, STAINLESS, HYGENIC FITTING, INSERT FITTING, STAINLESS STEEL, 909, 25 lb

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

, Ambient and fluid temperature: -10 to 50 C, VALVE,COMPACT,LATCHING,C/ROOM, VALVE, VQ100 SOL VALVE 3-PORT, 15, VQ100 OTHER SIZE RATING, .05143 lb

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251 L/min [ANR] {In case of Inlet air

22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100 C, Ambient temperature: 0 to 60 C, Tubing O.D.: Metric size ? 6, 10, 12, 19, 25; ?Inch size ? 1/4", 3/8", 1/2", 3/4", 1", VALVE, FLUOROPOLYMER, VALVE, FLUOROPOLYMER, .00000 lb

22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100 C, Ambient temperature: 0 to 60 C, Tubing O.D.: Metric size ? 6, 10, 12, 19, 25; ?Inch size ? 1/4", 3/8", 1/2", 3/4", 1", VALVE, FLUOROPOLYMER, VALVE, FLUOROPOLYMER, .00000 lb

22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100 C, Ambient temperature: 0 to 60 C, Tubing O.D.: Metric size ? 6, 10, 12, 19, 25; ?Inch size ? 1/4", 3/8", 1/2", 3/4", 1", VALVE, FLUOROPOLYMER, VALVE, FLUOROPOLYMER, .00000 lb

(swivel elbow -5 to 150°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, FITTING, BULKHEAD UNION, INSERT FITTING, STAINLESS STEEL, 909, 25 lb

Mounting: C (Single Clevis), Cushion: N (Urethane Cushion), Bore Size: 25 (1"), Stroke: 0100 (1"), Temperature Resistant: XB6 [Heat Resistant, (-10 to150°C)]

Mounting: C (Single Clevis), Cushion: N (Urethane Cushion), Bore Size: 25 (1"), Stroke: 0200 (2"), Temperature Resistant: XB7 (-40 to 70°C)

Mounting: C (Single Clevis), Cushion: N (Urethane Cushion), Bore Size: 25 (1"), Stroke: 0800 (8"), Temperature Resistant: XB6 [Heat Resistant, (-10 to150°C)]

Mounting: C (Single Clevis), Cushion: A (Adjustable Cushion), Bore Size: 25 (1"), Stroke: 0300 (3"), Temperature Resistant: XB6 [Heat Resistant, (-10 to150°C)]

Mounting: C (Single Clevis), Cushion: A (Adjustable Cushion), Bore Size: 25 (1"), Stroke: 0200 (2"), Temperature Resistant: XB6 [Heat Resistant, (-10 to150°C)]

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (with Motor Cover), Guide Option: F (with Grease Holding Function), Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC)

Size: 40, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (with Motor Cover), Guide Option: F (with Grease Holding Function)

Size: 40, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (with Motor Cover), Guide Option: F (with Grease Holding Function), Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC)