HEC_W-E

Range Setting range : 0.1 to 9.9 C Min. increment : 0.1 C O v e r l o a d J u d g i n g Indicated content : Overload judging temp. range (Ex. : 0.2 C) T e m p .

EX120/121/122

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Step Motor Controller

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12

Table of Contents

conforming to MIL-C-24308.

Tie-rod Type Hydraulic Cylinder

LH 0.2 CHS CH2 C B W W D E d d D E LY MM MM CHA CHA 4 x LD Width across flats G Width across flats G LT LT NA NA Related Products S + Stroke Y X Y X LX B LS + Stroke DZZ + 2 strokes (mm) Bore size (mm) A B C LD LH LS LT LX LY a B E D d F G GA J K M MA MM NA H 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 9 47 168 8

MGP

Series MGP Series MGPS (d = Thread O.D.) (d = Thread O.D.) 1.5d or more 2d or more D By-pass port dia. D By-pass port dia. C 0.2 C 0.2 B 0.2 B 0.2 Piping Caution A 0.2 A 0.2 Depending on the operating conditions, piping port positions can be changed by using a plug.

Hygienic Design Cylinder Series HY

C D C D C Mounting bolt part no.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

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High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

5 Port Solenoid Valve Series VQZ1000/2000/3000

M S C C S M C S M NI NI IN IN OUT OUT B B 2 To CYL port To CYL port 4 P.960 P.961 P.962 P.974 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Factory-wired) P C D Regenerative option When using regenerative option, disconnect P( ) and D, and connect regenerative option to P and C. Refer to section 11.2 to 11.5. Supply the following power to L11 L21.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

RHC

d D D C C H H B B Material: Carbon steel Material: Carbon steel B Part no.

HEC_001W-E

I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.

A_HEC-OM-K001

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

Air Cylinder Series CS1

C C d d d S + Stroke ZZ + Stroke ZZ1 + l + Stroke Long stroke 4 x J 2 x P Width across flats KA 4 x FD With rod boot S + Stroke ZZ + Stroke ZZ1 + l + Stroke With auto switch: CDS1F 4 x J ~ = 2 x P Width across flats KA 4 x FD With rod boot ~ = ~ = S + Stroke ZZ + Stroke ZZ1 + l + Stroke (mm) Without rod boot With rod boot Type Bore size (mm) Stroke range (mm) A AL B B C D E EA F FA FD FT

CQS

Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Special long bolt for through-hole mounting is available as an option.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC