PF2D

1 Digital Flow Switch For Deionized Water and Chemicals Series PF2D ZSE ISE PSE Body and sensor Body and sensor New PFA New PFA Z I SE3 PS Tube Tube Super PFA Super PFA Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to

Actuator Position Sensor

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

Body Size: 40, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

Body Size: 40, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 30, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 30, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate

Body Size: 30, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 40, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]