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Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) Frequency (Hz) 50 25 12 60 20 8 Model Power source 5 50 3.5 35 6 50 8 55 6.5 45 8 50 0.5 60 9.5 50 11.5 55 Note) They are values in an ambient temperature of 20C 5C and application of rated voltage.

./0.05 MPa Ambient and uid temperature 5C to 60C Port size Rc1/4 (Gauge port Rc1/8) Weight Approx. 700 g (at 100 mm stroke) Construction/Principle of Operation When signal pressure enters input chamber q, the input diaphragm e is deected left. Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u.

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

F.O.F. 20N 30 O.T. 50 T.T. Adjustable Roller Lever/VM830-01-13 JIS Symbol 20N F.O.F. At lever length 38.1mm 20 P.T. 30 O.T. 50 T.T. Adjustable Rod Lever/VM830-01-14 JIS Symbol 2.3N F.O.F.

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

./0.05 MPa Ambient and fluid temperature 5C to 60C Port size Rc1/4 (Gauge port Rc1/8) Weight Approx. 700 g (at 100 mm stroke) Construction/Principle of Operation When signal pressure enters input chamber q, the input diaphragm e is deflected left. Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u.

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

Ambient 5C 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35 40 45 [50 Hz] Circulating fluid temperature [C] [60 Hz] Circulating fluid temperature [C] 012 018 024 A W HRS -20 (Single-phase 200 to 230 VAC) 1000 1000 Ambient 40C Ambient 32C Ambient 25C Ambient 40C 800 800 600 600 Ambient 32C 400 400 Ambient 5C Ambient 20C Ambient 25C Ambient 5C Ambient 20C 200 200 0 5 10 15 20 25 30 35 40

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Power consumption Temperature rise 4 W type 5C 10 W type 14C Required time for attachment/detachment: Approx. 5 seconds (per unit) Reduces installation time for multiple numbers of valves. During continuous operation at 24 VDC, 0.25 MPa, 300 Hz Filter is mounted to port 1 (IN). Filter is mounted to port 1 (IN) for quick disconnect type as well.

Data Maximum Settable Temperature Graph 1: IDH4 Graph 2: IDH6 F 50F (10C) 44.6F (7C) 41F (5C) Pressure dew point 37.4F (3C) 50F (10C) 44.6F (7C) 41F (5C) Pressure dew point 37.4F (3C) Air flow capacity scfm (L/min [ANR]) 17.6 (500) 28.3 (800) Air flow capacity scfm (L/min [ANR]) 15.9 (450) Selection example 24.7 (700) 14.1 (400) 21.2 (600) 12.4 (350) Selection example Selection example 10.6

Solenoid valve part number Allowable voltage range [Ambient and fluid temperatures: 5C or higher and 40C or lower] LPV21-mm-T4 LPV21-6mm-T6(A) LPV22-mmm-T4A LPV22-mmm-T6A 7. Do not use the switch unless the equipment operates normally.

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

. 3) Exhaust from other equipment Use the air consumption specified for each piece of equipment as a standard. 839 Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. flow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C

Manual override Indicator light U side 300 Lead wire length 2n-Rc 1/8, 1/4, C6, C8 Double check spacer (n) Individual SUP spacer (1) (2) Stations Control unit Pressure unit Filter element Drain cock D side Outlet for check Control unit n: Stations L Stations Formula 20n + 21 20n + 176 20n + 232.5 4 101 5 121 6 141 7 161 8 181 9 201 10 221 11 241 12 261 13 281 14 301 15 321 16 341 17 361

3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 120 120 170 170 45 45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary