5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

E EZ Grommet terminal 7 240 VAC, 50/60 Hz Locking type C (Lever) 1 VFR44 C 9 Other Conduit terminal T TZ VFR44 Option Option D DZ DIN terminal VFR40, VFR41: Pilot valve assembly is all plug-in (F).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Without auto switch CRB1B J Size Rotating angle Port location Vane type Shaft type J K S T X Y Z Double shaft (Long shaft without keyway & Four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers CRB2 CRBU2 CRB1 MSU J Z Y K S T X Key Key CRJ D C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

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D-A30 type D-G3/K3 type OJ D> U> 0' Hs ; c[j A AulO switch o o c: C' iii' JJ o Q, .J!

CJ2

Applicable bore (mm) B H C d Part no.

Pin Clamp Cylinders

as the port side B 90 from the port side C 180 from the port side D 270 from the port side Dustproof cover (Manual unlocking unit) D Clamp arm 2 x Rc1/8 Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6

2 Phase Stepper Motor/Without Motor Brake Series LXP

1 Section C 30 D Refer to page 300 for mounting.

CJ2

d C B H Part No.

Rotary Clamp Cylinders

0.15 0.1 0 0.052 5.5 54 72 8 62 40 28 M6 x 1.0 35 50 63 0 0.062 6.6 67 89 9 76 50 M8 x 1.25 0.15 0.1 9 80 108 9 92 60 M10 x 1.5 0.15 0.1 With arm Rod end width across flats F + Clamp stroke C + Clamp stroke D A F E B A 2 x G B D G C H (mm) (mm) H G G F F E D D C C B B A A Model MK32-M MK40-M MK50-M MK63-M Model MK32-N MK40-N MK50-N MK63-N M8 x 1.25 6.2 35.5 18 45 36 20 53.5 9 67 14 18 6

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

ZP

C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPX How to

Valve Single Unit

connector type) Manifold (c) DIN rail release button U side Position for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement Parts Description SX3000 Part no.

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.

Table of Contents

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

Compact Cylinder Series CQS

Rod end nut Technical data 559 Compact Cylinder: Standard Type Double Acting, Double Rod Series CQSW 12, 16, 20, 25 How to Order B 20 30 C D CQSW M9BW B D 20 30 C CDQSW With auto switch Made to Order Refer to page 561 for details.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

for LECA6: LEC-D-1-2 Terminal name Function Details Accessory 0V Common supply () M 24V terminal/C 24V terminal/EMG terminal/BK RLS terminal are common ().