New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4

Direct Operated 3-port solenoid valve

Wiring 1) Insert cable gland (4), washer (5) and rubber seal (6) into cable In the case of indicator light assembly DC Terminal no.1 (+) (7) in order, and insert it into housing (2). Coil 2) Loosen screws (11) on terminal (3). Insert lead wires (10) and tighten screws (11) again. Terminal no.2 (-) Note 1) The tightening torque should be 0.5 Nm +/15%.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

Digital Pressure Switch

Piping specification: -C4L, -C6L First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn.

ZVB40_E_

ZVB S B 40 2 4 5 3 1 1.

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Wireless System

Cable core wire colors Brown White Blue Black Green/Yellow 1 2 3 4 5 Connections 19 Accessories EX600-W Series u Power Supply Cable with M12 Connector (B-coded) SPEEDCON PCA1564927 Socket specification, Cable length (L) 1564927 Straight 2 m 1564930 Straight 6 m 1564943 Angle 2 m 1564969 Angle 6 m Straight connector type Angle connector type 50 L 36.3 14.8 50 L 44.5 2 1 5 2 1 5 28 5.9 M12

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

4/5 Port Air Operated Valve Series SYJA3000 1

1 B A 1 24 1 B A 1 10 R P (For manifold mounting) 2-2.6 4 37.5 19 43 15 70.5 48 17.5 70.5 Manual override 24.5 11.5 11 (For mounting) 2-2.6 1/8 46.5 Manual override 33.5 (Piping port) M5 x 0.8 21.5 2-1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 6 6 21 32 24 15 R1 P 17 17 8.5 R2 45.5 2-1.8 (Bleed port) With fiflter (80 mesh) 5-2-24 7 4/5 Port Air Operated Valve Series SYJA7000 How

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

Clean Air Module

With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions

DOC1023126

*Refer to "1-6 Accesories" for belonging parts of each bracket. 27 - .

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

High-precision Digital Pressure Switch

value (main display). (1) Press and hold the SET button for 1 and 3 seconds in measurement mode.

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152