Process Pump

E 41 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tubing size Metric size Inch size Applicable process pump Applicable process pump Applicable Applicable Reducing Reducing Class No.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

MXU

(Refer to the figure below.) 0.061 0.053 0.062 34 20 0.076 0.066 0.074 38.5 25 0.076 0.066 0.074 41 30 0.047 0.041 0.109 28.5 5 0.047 0.041 0.109 31 10 0.080 0.069 0.169 36 15 MXU10 9.5 0.080 0.069 0.169 38.5 20 0.103 0.089 0.212 44 25 0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25

Compact

0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 @2 @0 #3 #4 #5 1212 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 17 18 20 21 22 23 24 26 27 28 29 33 34 38 39 40 41 42 43 Description Material Note Aluminum alloy Aluminum alloy Special resin Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Special resin Stainless steel Sintered iron material

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Clean Regulator

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

Precision Clean Regulator

Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port size 41

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

SYA3000/5000/7000

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 SYA Pilot pressure MPa SYJA Specify the part numbers for valves and options together beneath the manifold base part number. VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa (Refer to Best Pneumatics No. 1-1.) Specify the part numbers for valves and options together beneath the manifold base part number. SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

Trimmer Auto Switch

Parallel style MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 Parallel style MHZL2 6.0 7.0 10.0 11.0 Wide type MHL2 7.0 8.0 8.5 10.5 11.0 12.5 Parallel style MHS2 (2 fingers) 6.5 7.0 7.5 8.5 Parallel style MHS3 (3 fingers)/MHS(L)3 6.5 7.0 7.5 8.0 Parallel style MHS4 (4 fingers) 6.5 7.0 7.5 8.5 Angular style MHC2 30 to 10 30 to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

125

VEX3221: M5 VEX3222: None (PA/Pilot air port) 58.6 Air operated: VEX3220 61.8 M5 (Port P2/Pilot air) Max. 10 101.7 Pg7 Applicable cable O.D. 3.5 to 7 87.9 M5 (Port P1/Pilot air) 80.4 69.1 3R 1P M5 (PE/Pilot exhaust port) P1 2A 1 59.1 58.1 102.6 64.1 1732 3 Port 3 Position Valve VEX3 Series Dimensions: Base Mounted/VEX342 External pilot solenoid: VEX3421 Internal pilot solenoid: VEX3422 41

NAMUR

Namur mounting allows for installation between the Actuator and SMC PPS Body Solenoid Valve or on a Delrin Sub-base 41 23.5 3. Will help reduce "water hammer" by throttling the actuator speed allowing for more precise Actuator control 2xDUCK-BILL CHECK VALVE (3/5 PORT) 4. Stainless Steel adjustment screws PORT 1 PORT 3 5.

Series VS

PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

63 71 75 Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 43 46 50 2 position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41

EX120/121/122

Enclosed parts Round head screw (M4 x 6) 2 pcs. 41 Fieldbus System Series EX600 5. Marker (1 sheet, 88 pcs.) 4. Seal cap (10 pcs.) The seal cap needs to be placed the unused I/O connector. The specified protection cannot be maintained. The signal name of I/O device and each unit address can be entered and mounted on each unit.