Digital Flow Switch (Remote type sensor unit)

(at 500 VDC) between terminals and case Standards CE/UKCA marked, UL (CSA) -21No.PF-OMJ0016-J Specifications of piping port Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VX31/32/33

5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103

Digital Flow Switch (Integrated display type)

/750L-C6(-L) 84.4 8 2.8 depth 8.4 PF2M725/750L-N7(-L) 84.4 11.8 2.8 depth 8.4 PF2M711/721L-C8(-L) 88 12 2.8 depth 6.2 PF2M711/721L-N7(-L) 88 10.3 2.8 depth 6.2 -100No.PF-OMW0007-E PF2M7#-#1/2(-L) (mm) Model A B P PF2M701/702/705/710/725/750-01(-L) 66 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-N1(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Flow rate range) Note 1) Certificate in both English and Japanese Made to Order 2 to 200 L/min 201 Flow adjustment valve Unit specifications Nil None M SI unit only Note 2) S Yes Nil Unit selection function Note 3) Note 2) Fixed unit: Instantaneous flow: L/min Port size Accumulated flow: L C8 8 (5/16") One-touch fitting Note 3) Since the unit for Japan is fixed to SI due to new measurement 02

Water-cooledThermo-chiller

During operation 50 to 95F (10 to 35C) During storage 32 to 122F (0 to 50C) (but as long as water or circulating fluid are not left inside the pipings) 5. Locations where the ambient relative humidity exceeds the limit as mentioned below. During operation 30% to 70% During storage 15% to 85% 6.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Table of Contents

36 42 48.5 DC 34 37.5 46 54 60.5 BB 72 82 104 120 140 BA 52 62 70 86 106 CB 20 22 29 30.5 37.5 DO 42 47.5 60 70 80.5 BD 24 30 32 40 50 BC 52.6 62.6 70.6 86.6 106.6 CA 8 9 9 12 14 AD 35.5 38.5 46.5 51 70 K 9 9 10 11 12 AC 3 3 3 4 5 J 20 21 24 28 32 AA 58 64 77.5 89 116 AB 55 61 74.5 85 111 H 10.4 13.5 17.7 19.5 23.5 5 7 8 10 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 R 44 53 62 76 95

15

8 70 50 4 44 69.8 83.5 M4 x 12 M5 x 45 11 NX M5 x 0.8 9 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 69.8 83.5 M3 x 12 M5 x 45 12 NM2 M4 x 0.7 8 50 36* 4.5* 38.5 69.8 83.5 M4 x 12 M5 x 25 10 32

Air Slide Table

) depth 2.5 7.4 8.5 A 8.5 4.2 8 A NN x M5 x 0.8 tapped through hole 5 HB GB Cross-sectional view A-A 39 29 11 Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

AD 35.5 38.5 46.5 51 70 J 20 21 24 28 32 AA 58 64 77.5 89 116 AB 55 61 74.5 85 111 AC 3 3 3 4 5 H 10.4 13.5 17.7 19.5 23.5 5 7 8 10 11 MHW -X P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 11 14.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Air Cylinder

[mm] Bore size A B C D F GA GB H LB LC LH LT LX LY LZ MM NA NB NC NN S SA T X Y Z ZA 6 15 12 14 3 8 14.5 5 28 15 4.5 9 1.6 24 16.5 32 M3 x 0.5 16 9.5 7 M6 x 1.0 51.5 49 3 5 7 79.5 77 10 15 12 14 4 8 8 5 28 15 4.5 9 1.6 24 16.5 32 M4 x 0.7 12.5 9.5 M8 x 1.0 46 5 7 74 16 15 18.3 20 5 8 8 5 28 23 5.5 14 2.3 33 25 42 M5 x 0.8 12.5 9.5 M10 x 1.0 47 6 9 75 52 Air Cylinder: Standard Type

ISO Cylinder

x 0.8 12 5 28 13.4 M4 x 0.7 19 6 15 12 7 16 10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S

MY1

27 33.5 39 49 61.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 PB 20 25 30 35 40 PC 40 50 55 70 85 PD 4.5 5 6 10 12.0 Q 153 191 206 264 322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Dual Rod Cylinder Series CXSJ/CXS

9 and @0 25 CXS32A-PS 32 573 Series CXS Dimensions: 20 53.5 19 43 9 2 x cushion needle 2 x M5 x 0.8 thread depth 4.5 (Piping port) S ZZ SS 12 12 25 Z 6 30 23 1 (Steel ball) 50 0.2 (4.5) 50 0.2 67.5 53 62 28 32 6.3 5 2 x 5.5 through 2 x M4 x 0.7 1 11.5 2 x 9.5 counterbore depth 5.3 thread depth 6 2 x M5 x 0.8 (Through-hole) (Z) 4 x M4 x 0.7 thread depth 5.5 30 6.5 12.5 9.5 7.75 (Z) 2 x M4

CV/MVGQ

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

CV/MVGQ

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1