AMD

service indicator Nil B 3 4 650 1 850 11 2 N.C. auto-drain C N.O. auto-drain D Refer to the table below for accessory/option combinations.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N Courtesy of Steven Engineering, Inc.-230

Actuator Position Sensor

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult P/A for fluids other than those listed. 6 Series FQ1 Made to Order Consult P/A for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification . 4 1.1 LECS series driver . 4 1.1.1 How to order . 4 1.1.2 Specification . 4 1.2 LECY series driver . 7 1.2.1 How to order . 7 1.2.2 Specification . 8 1.3 Construction . 9 2.

Digital Flow Switch

and 4.) -9 and 9.) -19 and 19.)

Digital Pressure Switch

Analog output Output impedance Approx. 1 k Output current (Rated pressure range) Current output: 4 to 20 mA2.5%F.S. Current output 4 Linearity 1.5%F.S. 1.0%F.S.

Digital Flow Switch (Remote type monitor unit)

series 0.4 to 4 L/min type (PF2D504) 1.8 to 20 L/min type (PF2D520) [04d]: [20d]: [40d]: 4 to 40 L/min type (PF2D540) Press the button.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Clean Room Rodless Cylinder Series CYP ø15, ø32

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke

Digital Flow Switch

Nominal thread size Required torque Rc1/4, NPT1/4 12 to 14 Nm Nominal thread size Width across flats of attachment Rc1/4, NPT1/4 17 mm G1/4 21 mm -19No.PF-OMO0005-F Piping for the One-touch fitting Insert the tube all the way into the fitting so that it cannot be pulled out. Insertion with excessive force can cause damage. Ensure there is no leakage after piping.

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

PAB-OM-B007-B

set K T PA 5 3 1 C heck valve set K T PA 5 3 6 S w itching valve set K T PA 5 3 7 4 .

Series MLGP

Description Note 1 Body 16 Ball bushing MLGPL 31 Hexagon socket head plug 2 Lock body 17 Spacer MLGPL 32 Holder MLGPM 3 Piston 18 Pivot pin 33 Felt MLGPM 4 Piston rod 19 Pivot key 34 Type C retaining ring for hole MLGPL 5 Head cover 20 Lever 35 Rod seal A 6 Intermediate collar 21 Dust cover 36 Rod seal B 7 Collar 22 Type C retaining ring for hole 37 Rod seal C 8 Lock ring 23 Bumper A 38 Scraper

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

24 22 9 59 68 15 76 40 29 55 MXP12-15B 42 40 29 89 98 25 106 60 49 75 MXP12-25B 12 Series MXP Dimensions MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

PROFIBUS DP Compatible Fieldbus System

Green OFF COM C has no received data. COM C Green ON COM C is receiving data. Green OFF COM D has no received data. COM D Green ON COM D is receiving data. NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Latching Operation Indicator light A-C ON (Set) Vacuum generation Orange B-C ON (Reset) Vacuum stop Green N.C. Operation Indicator light A-C ON (Set) Vacuum generation Orange OFF Vacuum stop If the supply valve is latching type, continuous energization is not necessary because it maintains the switching position with momentary energization for at least 10 msec.

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.