Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

04 9 stations 4 stations 02 02 2 stations 2 stations Specified layout (Up to 9 solenoids possible) Specified layout (Up to 19 solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Gun Type Ionizer

300 250 200 Flow setting: 6 150 Flow setting: 4 100 Flow setting: 0 Flow setting: 2 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Pressure [MPa] How to measure Pressure measurement Air supply measurement Connecting tube: O.D. 8 x I.D. 5, 50 mm 184 Gun Type Ionizer IZG10 Series RoHS How to Order IZG10 08 01 01 AC adapter*1, Power supply cable One-touch fitting Nozzle type Symbol Port size 08 8 (Metric) 09

KK/KK13

KK13P-03M Flow rate (l/min [ANR]) 2,500 2,000 Connected plug and socket 1,500 KK13S-02M + KK13P-02M 1,000 500 0 0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Primary pressure (MPa) 11 S Couplers How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 09 02 9 stations 2 stations 9 stations 2 stations Specified layout Note 2) Specified layout Note 2) (Up to 18 solenoids possible) (Up to 18 solenoids possible) 18 18 18 stations 18 stations Note 2) Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.

7ND9071en

ATEX 033X VTT 09 ATEX 034X Ui 24 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

44

(inch) L Model KKA 1/8" (3.18) KFG2N-01 1.9 8 7.8 H 5/32" (4) KP KFG2N-03 1.9 8 7.7 1/4" (6.35) KFG2N-07 4.6 12 9 LQ 5/16" (8) KFG2N-09 6.7 14 10.1 L MQR 3/8" (9.53) KFG2N-11 10.7 17 11.7 T 1/2" (12.7) KFG2N-13 13 19 12.8 IDK 331 KFG2 Series Applicable Fluid List How to Read the Table : Completely unaffected or largely unaffected. : May be slightly affected, but, dependent upon condition,

CATALOG

-6 19.5 5/16 10 86 10 18 29.5 27 10.6 61.5 12 16 18.5 5/32 6 30 KM11-03-09-10 21.5 3/8 6 77.8 10 19.5 31.5 30.5 13.3 48 13 17 21 1/4 7 32 KM11-07-11-6 21.5 10 13.3 3/8 104 10 19.5 31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS

Series SV

Specified layout (Up to 8 solenoids possible.) 18 08 20 08 8 stations 18 stations 8 stations 20 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations Note 1) Note 1) Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 09 02 09 02 9 stations 2 stations 9 stations 2 stations Note 2) Note 2) Specified layout (Up to

2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

5 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 19 09 19 stations 9 stations Note 1) Double wiring specifications: Single, double and 3 position/4 position solenoid valves can be used at all of the manifold stations.

Compact manifold regulator ARM5 Series

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 4 6 4 6 1/4 1/4 1/4 5/16 5/16 5/32 5/32 Symbol Symbol 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

HEC-OM-S008

Data of UT and Check Sum Character data 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH HECR 3-4 Details of Communication Format 4 Details of Communication Format 4.1 Temperature setting (without writing FRAM) The host computer sets temperature of each Thermo-con. In this command, temperature setting data is not written in FRAM.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

EXxx-OMY0006CN

PROFIsafe (Acknowledgement) (Acknowledgement) (Acknowledgemet) PLC / Acknowledgement (Acknowledgement) : SI (Acknowledgement)1 SI 99 No.EX##-OMY0006CN 17.A PROFIsafe CRC Cyclic Redundancy Check CRC Telegram / CRC Telegram Cross circuit UT1 UT2 IN N or IN N+4 UT1 UT2 2 / Consecutive number F-Parameter (PROFIsafe system description, Version 09, November 2007 ) F-Parameters PROFIsafe

One-touch Fittings

41 13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing O.D.

SZ3000

02 04 02 9 stations 4 stations 2 stations 2 stations Specified layout (Up to 19 solenoids possible) Specified layout (Up to 9 solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

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(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (