SI unit for AS-Interface

250 mA or less 7 240 mA or less 6 120 mA or less 6 1: The power supply for the communication must use the special power supply made for AS-i.

Air cylinder

Fig. 6 How to remove rod seal Fig. 7 How to remove piston seal 3) Tube gasket Pull out with the precision screwdriver. 20 3-2-3. Grease C a u t i o n Use SMCs recommended grease.

Air cylinder

Construction Fig. 7 Standard product: Double acting / single rod / Air cylinder with air cushion No.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

Consult SMC for the product usage for an application which requires a constant speed operation. 2-7. Shock Absorbing Mechanism 2-7-1. Rubber cushion (MY3A series) As shock absorbing stroke of rubber cushion is short, additional cushioning equipment is necessary for stroke adjustment.

VFR4000-OMH0003

Low pilot pressure (7) Swollen spool packing (8) Excessive supply oil amount (14) Intrusion of foreign matter (11) Wrong Pressure supplied X port.

MHF2

7, !9 Mounting screw Finger assembly MHF-A0802 MHF-A0802-1 MHF-A0802-2 MHF2-8D2 4 pieces/unit The bolts for body through-hole mounting are attached to the product. They are also provided at an order of 1 piece or more with the above part numbers. 12-3-10 11 Series MHF2 Low Profile Air Gripper Construction MHF2-12D to 20D i q !3 !0 @2 w @1 u !1 MHZ MHF MHL MHR MHK MHS !2 !7 !

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

MHF2

7, !9 Mounting screw Finger assembly MHF-A0802-2 MHF-A0802-1 MHF-A0802 4 pieces/unit MHF2-8D2 The bolts for body through-hole mounting are attached to the product. They are also provided at an order of 1 piece or more with the above part numbers. 12-3-10 11 Series MHF2 Low Profile Air Gripper Construction MHF2-12D to 20D i q !3 !0 @2 @1 !

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

7 Air Slide Table Long Stroke Type Series MXY 6, 8, 12 How to Order MXY 6 50 M9N S Air slide table, long stroke type Number of auto switches 2 pcs.

PF2D

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

PF2D

Note 7) Accumulated flow rate is reset when the power supply turns OFF.

IDX-OM-W014

7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1

Air preparation filter

Troubleshooting 14 7. Assembly and replacement procedure 7-1. Bracket assembly 15 7-2. Auto drain replacement 15 7-3. Element replacement 19 8. Dimensions 20 -2- Doc. no. AMX-OMU0058-C Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

PSxx-OML0002CN

30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 NPN2 PNP2 9 OUT2 10 OUT2 11 12 13 14 15 16 2 -38No.PS-OML0002CN-G [F97] () 10 <> OFF FUNCON <> [F97] -39No.PS-OML0002CN-G OFF

Digital Pressure Switch

. -10No.PS-OMV1001-C Definition and terminology Terms Meaning 2 2-colour display 2 colours are used to indicate a value, which change according to the output status. 7 7-segment display When "8" is shown on the display. It is called 7-segment because 8 consists of 7 pieces of "(segments)". A Analogue current output Refer to "Analogue output (function)".

Escapements Series MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

27 37 5 44 MXPJ65 35 53 42 47 10 59 MXPJ6-10 7 Precision Air Slide Table Series MXP Dimensions MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 7 4 H 2.3 11.2 3 1 1 0.05 D B 9.5 3.5 14 18 20 13 6 5 5 8 F 5 6 Width across flats 2 Width across flats 6 13.5 6 2-M4 x 0.7 Prepared hole dia. 3.3 4-M3 x 0.5 depth 3 17 0.05 Mounting reference planes B D Stroke: S M 2 M4 x 0.7 J 3 Z Max. 9.5 (rubber

High Vacuum L Type Valve

Product Specific Precautions 3 7 (Maintenance parts) 4. Specifications 9 5. Construction and Dimensions --11 6. Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0003 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.