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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 2000 D-SMC.L.A. P-80 (JT)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 2000 D-SMC.L.A. P-80 (JT)

adjuster option Axial piping type S: Stroke (mm) With end lock With buffer Extension end Rubber stopper Shock absorber 10 20 30 40 50 75 100 125 150 Retraction end Extension end Retraction end MXS6 13 + 0.15 S 30 5 10 80 100 115 155 180 MXS8 26 + 0.17 S 40 40 9 45 15 35 150 160 190 235 285 415 MXS12 43 + 0.21 S 90 80 20 60 30 50 340 340 340 400 500 690 930 MXS16 55 + 0.21 S 160 120 30 105

type S: Stroke (mm) With end lock With buffer Extension end Rubber stopper Retraction end Shock absorber 10 20 30 40 50 75 100 125 150 Extension end Retraction end MXS6 (L) MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) 10 5 30 180 155 115 100 80 13+0.15S -X 15 35 9 45 40 40 410 285 235 190 160 150 26+0.17S 30 50 20 60 80 90 890 660 480 385 325 325 325 43+0.21S Individual -X 50 80 30 105

Stroke range (mm) AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O A 11 11 112 125 82 95 6.6 9 65 115 M6 25 108 30 55 60 80 25 45 M6 x 1 depth 9 90 75, 100, 125, 150, 200 14 13 134 150 92 108 9 9 75 135 M8 30 130 35 65 70 100 35 54 M6 x 1 depth 13 100 75, 100 125, 150 200, 250 300 14 16 134 150 102 118 9 9 85 140 M8 35 135 40 73 80 106 35 60 M6 x 1 depth 13 120 17 19 170 186 134 150 9 12 105

Model 10 13 16 J K: 4 K: 6 G H G H Model ZPRB 6-0-A8 G H G H G H L M L M 79.5 15 53.5 ZPRB10-0-A8 ZPRB10-0-A10 110.5 56.5 63.5 65 99 23 61 97.5 95 43 10.4 20.6 12.8 21.6 ZPRB15-0-A8 ZPRB20-0-A10 115.5 61.5 133 135.5 137 73.5 75 71 51 ZPRB25-0-A8 ZPRB30-0-A10 125.5 71.5 10.4 20.6 12.8 21.6 143 145.5 147 83.5 85 81 ZPRB40-0-A10 179 181.5 183 93.5 95 91 77 193 ZPRB50-0-A10 101 189 103.5 191.5 105

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105

(UVW) ) 4. 15 105 15 A33 1. LECSC-DC400V 2. PA02 00() 3. 1. 2. 4. 5. 1. 2. 6. 7. 8. (UVW) A37 1. 2. PA02 PA02 3. PA06PA07 4. EEP-ROM 10 5. MR-J3-D01 MR-J3-D01() () 6. A45 1. 2. 3. 55 055 4. 15 106 15 A46 1. 40 040 2. 1. 2. 3. 3. A47 (2.5) A50 1 1. 1. 2. 3. 2. 1. 2. 3. 3. 1. 2. 4. UVW UVW 5.

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.250 words MAX.500 byte Output MIN. 1 word MIN. 2 byte MAX.248 words MAX.496 byte When configuration assembly fundtion is not used: Set to "0".

or more 10 or more 3.2, 1/8" 44 or more 35 or more 25 or more 16 or more 4, 5/32" 56 or more 44 or more 26 or more 20 or more 3/16" 67 or more 52 or more 38 or more 24 or more 6 84 or more 66 or more 39 or more 30 or more 1/4" 89 or more 70 or more 57 or more 32 or more 8, 5/16" 112 or more 88 or more 52 or more 40 or more 10 140 or more 110 or more 69 or more 50 or more 3/8" 134 or more 105

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

Input =100 Output =150 Configuration =105 (5)Size: Set as below. Input =Number of inputs connected. Output =Number of outputs connected. Configuration =0 (4) (1) (5) (2) (3) -61No.EX-OMN0032-D I/O Map Each unit of the product has its own I/O occupied byte.

Facility water Facility water IN pressure MPa 0.3 to 0.7 (45 to 100 [PSIG]) Facility water port Rc 3/4 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 Main breaker amperes interrupting capacity kA 50 Dimensions *6 mm W380D665H860 (W14.96xD26.18xH33.86 [inch]) Weight (HRW-H / HRW-HS)*7 kg Approx. 90 (198 [lbs]) / Approx. 95 (209 [lbs]) Approx. 100 (221 [lbs]) / Approx. 105

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1998 D-SMC.L.A. P-86.5 (JT)

Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 46 91.5 1.5, 2.2, 3 Mounting hole 4 x 5.5 30 48.5 41 65.5 42 53.5 100.5 41 69.5 R S 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 33 36 56 51.5 51 68.5 52 56.5 103.5 51 72.5 105 64.5 54 59.5 71 60.5 59 106 59.5 75 113 (mm) Grommet Conduit DIN terminal Electrical entry (DC, AC/Class H) B Model Orifice diameter A Bracket mounting Port size P C D E F H Conduit

T 93 103 108.5 T 88 98 103.5 T 89 99 104.5 U 68.5 71 71 T 88 98 103.5 U 33 36 36 U 51.5 54 54 V 56.5 59 59 V 72.5 75 75 67.5 70 77.5 35 40 40 32A 40A 50A 160 170 180 172.5 185 198 22.5 25 25 51.5 54.5 59 32 36 36 135 140 155 12 14 14 100 105 120 36 42 52 VXED2270 VXED2380 VXED2390 32 Energy Saving Type Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve Series VXEZ22/23 For

Reducer elbow KQ2L Male connector P.105 KQ2H Cross P.121 KQ2TW Use to change the tube direction of Onetouch fittings by 90 and connect tubing of reduced size. Use to pipe a female thread in the same direction. Most general model. P.109 Use to four-branch a line.

130 155 180 147 160 172 185 210 235 260 23.5 10.5 32 12.5 25 37.5 50 75 100 125 67 80 92 105 130 155 180 149 162 174 187 212 237 262 23.5 10.5 40 12.5 25 37.5 50 75 100 125 71.5 84.5 96.5 109.5 134.5 159.5 184.5 181 194 206 219 244 269 294 27 10.5 Symbol Stroke Bore size (mm) Boss-cut Female Rod End (mm) With Air Cushion (mm) Bore size ZZ Without rod boot With rod boot 1 to 50 51 to 100