Fieldbus system (PROFIBUS DP compliant)

Memory map of output data Data (2 byte) Output area Branch connector (OUTPUT) MSB LSB MSB LSB 15 8 7 0 byte (d) byte (d+1) Word(c) COM A byte (d+2) byte (d+3) Word(c+1) COM B byte (d+4) byte (d+5) Word(c+2) COM C byte (d+6) byte (d+7) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

IP8001 Series

position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 30 7: Be sure to set all 11 date items.

PSxx-OMG0005CN

DC+ OUT PSE5615V 1 k DCLINE+ PSE56--28 420 mA 500 (24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12

Digital Pressure Switch

Compound -100.0 to 100.0 kPa -100 kPa 100 kPa Positive pressure -0.100 to 1.000 MPa -0.1 MPa 0 1 MPa -57No.PS-OMM0005-J Dimensions Side piping Z/ISE10(F)-M5-#-# Rear piping Z/ISE10(F)-M5R-#-# -58No.PS-OMM0005-J Side piping Z/ISE10(F)-01-#-# Side piping Z/ISE10(F)-N01-#-# -59No.PS-OMM0005-J Panel mount side piping Z/ISE10(F)-M5-#-### + ZS-39-B Panel mount rear piping Z/ISE10(F)-M5R-#-###

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

PF2D

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2504/520 0.5 PF2540 20 40 60 80 100 0 90 Fluid temperature [C] 16-11-38 3 Series PF2D Digital Flow Switch For Deionized Water and Chemicals How to Order Remote type Display unit PF2D3 A 0 M 0 Unit specifications Nil M With unit switching function Fixed SI unit Note 1) Note 1) Fixed unit: Real-time flow rate: l

Precision Clean Regulator

size 41 IN OUT A B C D Model Port size SRP111-M5 M5 x 0.8 14 23.5 30 30 C D SRP111-01 Rc 1/8 15 22.5 40 40 873 SRP Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

KP/KPQ/KPG

Grade 1 10-1 0.2 0 0.1 0.2 0.3 0.5 1 -20 0 20 40 60 80 Particle diameter m or less Operating temperature C 15-5-8 Clean One-touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

IDX-OM-W035

117kg 123kg 1ANR 2065% 2 330mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFB Series 6-1 6-1 IDX-OM-W035 6 6-3 IDFB22E/37E A B G D E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

LZ-OM004xx

B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

Return Filter FH100 Series

Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70

EXxx-OMY0006CN

C. N. C. 34 Fig. 6-1 24 No.EX##-OMY0006CN 7. 7.1. 8 2xM5 (= 1.5 Nm) 2xM5 (SI = 1.5 Nm) 4xM () Fig. 7-1 8 VQC4000 7 25 No.EX##-OMY0006CN 7.1.1. SI 2 / =0.6 Nm O Fig. 7-2 IP65O 7.1.2. SI 1x 2x ( 2.5 mm= 1.3 Nm) Fig. 7-3 IP65 IP65 26 No.EX##-OMY0006CN 7.2.

High Vacuum L Type Valve

E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

High Vacuum L Type Valve

E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

IP80-OM00019

(1) (2) (3) (4) (5) (6) OUT1 (1)OUT1OUT2 (2)+(3) (4)/ () (5)IP8000(2) (6)IP8100(3) 15 7-1 5 O K O O K K (1) 0% (4mAD (1) 0% (4mAD C) C) (2) 100%(20 (2) 100%(2 mADC) 0mADC) (3) 0%(1) (3) 0%(1) (4) (4) 16 7-2 / () mADC 17 18 18OUT1OUT2A 1718 ( 1/16-1 ) 11-1(/) 7-3 A 1M1/8OUT117 1/8 1/81/4 2A(17) SUPOUT1 A 17 8.

Fieldbus system PROFIBUS DP compatible SI unit

Ignores excess current per unit for 100 msec after inrush. Disable Does not ignore excess current. Enable Ignores excess current.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200