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Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

Element replacement is easy with the V-band type.

size d 15-3-4 5 Flame Resistant (Equivalent to UL-94 Standard V-0) FR One-touch Fittings Series KR Plug-in Reducer: KRR Effective area (mm 2) FR soft nylon FR double layer Applicable tubing O.D.

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

DC-DC converter (isolated) Pin #1: Brown wire FG +24 V TD+ TD0 V Power supply for output INPUT OUTPUT +24 V 0 V COM D +24 V 0 V +24 V RD+ RD0 V Power supply for input and controlling GW 2 13 12 Wiring (continued) Press fitting Press the cover to the body with plier etc. Confirmation It is completed with a check on 4 latches engaging. 3 NOTE 1.

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

INPUT COM D COM C COM B COM A Settings 2 4 Mounted by screw 54 5 16 70 5 PWR (V) Put Claw 1 of the body under DIN rail and push it upward.

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.

D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

ZQ-OM00801-D Manifold Vacuum Pump Unit D CE/UKCA -compliant Note 3) CE/UKCA compliant products are not available for 1, 2, 3 and 4. 12 - Doc. no. ZQ-OM00801-D B KQ2S23-M5N1 KQ2S04-M5N1 KQ2S04-M5N1 KQ2S06-M5N KQ2S06-M5N KQ2L04-M5N1 KQ2L23-M5N1 KQ2L04-M5N1 CE/UKCA compliant D CE/UKCA marked Note) CE/UKCA compliant: for DC only. 13 - Doc. no. ZQ-OM00801-D Manifold 14 - Doc. no.

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

113 g() 55 g( ) 1 2Vcc0 V 3[PSE530]1826 -36No.PS-OMH0005CN-D () + +48 48 -37No.PS-OMH0005CN-D A B C D Anm.: Die Angaben knnen ohne vorherige Ankndigung und ohne dass dem Hersteller daraus eine Verpflichtung entsteht, gendert werden. 2009-2011 SMC Corporation Alle Rechte vorbehalten No.PS-OMH0005CN-D

D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, F/MS/R COMBO MODULAR, AIRLINE EQUIPMENT, AC MASS PRO, FC, AC MASS PRO 1/2 MODULAR (NPT), 4.71789 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureMinimum operating pressureSet pressure rangeRelief pressureNominal

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.