Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion,

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

Clean Gas Filter

2) SFA102SFA202SFA302 Connection Model (A) (B) SFA102-02 Tube 89 76 TSJ1/4 SFA202-02 Swage 93 96 SFA302-02 Joint 101 120 ()Reference dimensions 3) SFA103SFA203SFA303 Connection Model (A) (B) SFA103-02 Union 117 76 UOJ1/4 SFA203-02 O Ring 122 96 SFA303-02 Joint 130 120 ()Reference dimensions -8- 3.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

3 Port Air Operated Valve

Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Clean Gas Filter Clean Gas Strainer

Case, Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) SFB10PTFE membrane Filter medium Main material SFB20-02 Stainless steel 316 sintered metal Seal Fluororubber (FKM) Packaging Antistatic sealed double package -7- 2-3 Dimensions 1) SFB100-02,SFB200-02: Rc1/4 SFB101-02,SFB201-02: NPT1/4 SFB104-M5: M5 2) SFB102-02,SFB202-02: TSJ1/4 (Tube Swage Joint) 3) SFB103-02,SFB203

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

VSA4

VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

Power Valve Precision Regulator

VVEX2-2-5-02 VEX1233-G VEX1-17 4 pieces 1 piece AP100 Note) Not conforming to ISO1179-1.

SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 SF SF NPT 1/