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Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 180°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø2, Seal: -

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Push Lock Calibrated, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Push Lock Calibrated, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm)

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Series VVXA31/32 Common (C.O.) Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

Check that a proper connection is established between the power cable and main breaker of this system. 02 Incorrect Phase Error FLT Stop The power phase rotation is wrong.

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

Note (mm) Models A 01 02 01 02 IZN10E06 3.5 IZN10E07 7 28 Doc. no.IZ-OMV0005 16 17 One-touch fitting (Elbow)IZN10E(mm) Models B C D IZN10E-16 22 16 11.5 IZN10E-17 24.5 18.5 12 Female threads for pipingIZN10E-11 Width across flats: 12 29 Doc. no.IZ-OMV0005 L-bracketIZN10-B1 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting

: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007

assembly ZK2-CH 2 04 -A Connector type Applicable stations 1 D-sub connector (25 pins) 02 For 2 stations manifold 2 Flat ribbon cable connector (26 pins) 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold -43No.

(Refer to Connector assembly on page 32.) Note 15) Select when no pressure switch for vacuum, no pressure sensor or pressure switch for vacuum without Lead wire with connector is used. -11No.

Page 32 [F 0] Display units, switch output specifications and diagnostic information selection function -49No.PS-OMX0002-A [F14] Zero cut-off setting When the pressure display value is close to zero, the product rounds the value and zero will be displayed. The zero cut-off range is 0.0 to 10.0% F.S., and can be set in 1.0% F.S. increments.

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

-1 supp reloc blk, 1/4 pt, VFS2000 SOL VALVE 4/5 PORT*** $18.53 + Add to Quote Add To Cart Add to Cart SMC VVFS2000-P-02-2 supply reloc block, VFS2000 SOL VALVE 4/5 PORT*** $18.53

03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform

Large effective area Low power consumption AVL2000-*02 1/4 67 111 31 55 40 64 (Max. 73) Manual/Manual solenoid lock out Modular design AVL2000-*02-*DZM 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL3000-*03 3/8 76 118 36 57 48 64 (Max. 73) How to Order AVL3000-*03-*DZM 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL4000-*04 1/2 98 133 47 61 52 64 (Max. 73) G 20 00 F DZM R 5 02 AVL AVL4000

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

AMX-OMY0038-A PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK20-(F, N)01 ~ (F, N)02(B)(-2, 6, C, R, Z)-D AMK30-(F, N)02 ~ (F, N)03(B)(-2, 6, R, Z)-D AMK40-(F, N)02 ~ (F, N)04(B)(-2, 6, R, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5. Construction / Options / Replacement parts 10 6.