Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Digital Flow Switch Series PFA For Air Series PFW For Water

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

VEX-OMY0001

02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1

S Couplers

LQ KKA3S-P01 KKA4S-P01 KKA6S-P01 KKA7S-P01 KKA8S-P01 KKA9S-P01 MQR Socket Plug O-ring T IDK 345 KKA Series Dimensions/Plug (P) With check valve Male thread type (mm) Body size H Width across flats T Connection port size Weight g Effective area mm2 L1 Min. bore size A Model L2 KKA3P-01M R 1/8 15.4 31.4 35.4 14 -02M 1/8 R 1/4 16.0 5.6 17.4 19.8 32.4 38.4 -03M R 3/8 32.9 32.9 39.4 KKA4P-02M

48

Number of needle rotations Dimensions D3 Applicable tubing O.D. d D1 L3 A L4 M T H (Width across flats) L2 L1 Metric Size/Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L41 A2 M Weight [g] Unlocked Locked Unlocked Locked AS121F-M3-02A-X790 2 11.9 5 AS121F-M3-23A-X790 3.2 7.2 17.2 21.7 5.8 15.8 20.3 16.9 13.3 AS121F-M3-04A-X790 4 8.2 AS121F-M3-06A-X790 6 10.4 18.6 23.1 16.5 6 AS121F-M3-01A-X790

A

ON OFF IN SMC OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

Using a T-spacer facilitates the branching of air flow.Features · Attachment for AC Series Air Combination.· Y110-M5-A applicable models: AC10-A, AC10B-A.· Y210-□01-A, 02-A applicable models: AC20-A, AC20B-A, AC20C-A.· Y310-□01-A, 02-A applicable models: AC25-A, AC25B-A, AC25C-A · Y310-□01-A, 02-A applicable models: AC30-A, AC30B-A, AC30C-A.· Y410-□02-A, 03-A applicable models: AC40-A, AC40B-A

VX

=+4 7> Terminal box 13 ( =+4 7> Electrical entry Nil # T 5 % & 23 (( =+4 7> 51 4 ! G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Air Suction Filter Series ZFA 1

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

PSE300.eng

Auto shift setting (PSE3 2(T)/3 5(T) models only) 1)Select the display mode of the pressure value at the time of auto shift operation. Either [AS (Auto shift)] or [ASO (Auto shift zero)] can be selected. AS (Auto shift): [AS] displays the differential pressure of the atmosphere and measurement pressure.

Soft Start-up Valve AV2000/3000/4000/5000

ON OFF IN OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

Stainless Steel Regulator Series NSR

Fluoro resin t'a'iao.hs N 46226 LSA F3x lji 3s9 Jro2 T..i 27 2.r4 l'rillimeter in Parentheses

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -