Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: C8 (8mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Body Class: 4 (Class 4, Orifice ø12), Valve Type: 0 (Normally Closed), Port Size: 04 (1/2), Thread: R, Rc, Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: V (Vacuum)
Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: 3 (Rc3/8), Digital Flow Switch: P1 [NPN Open Collector,1 Output+Analog Output (1 to 5V)], Regulator: R (With Regulator), ON/OFF Valve: V (With Air Operated), Restrictor: Without Restrictor, Filter: F (With Filter)
Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 6 (High Back Pressure w/Flow Rate Adjustment)
System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option
sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)]
/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]
. / N.C.), Rated Voltage: 6 (12 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure
Body/Exhaust Type: C (For Manifold - Common Silencer Exhaust), Nominal Nozzle Size: 10 (ø1.0), Supply Valve and Release Valve: R (Self-holding Release Valve Linked / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: C1 [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/o Lead Wire with Connector for
for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: E (Vacuum Break Flow Adjustment Needle Screwdriver Operation Long Lock Nut Type)
Size: 70, Voltage: 23 (Single-phase 230 VAC, 60 HZ), Thread Type: N (NPT), Options: RTV (R + T + V)
Size: 90, Voltage: 23 (Single-phase 230 VAC, 60 HZ), Thread Type: N (NPT), Options: RTV (R + T + V)
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)