Table of Contents

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

LEC-OM07605CN

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.

Serial Network

-573-7007 Fax: 09-573-7002 San Francisco Phone: (408) 943-9600 Fax: (408) 943-9111 Detroit Phone: (248) 299-0202 Fax: (248) 293-3 Seattle Phone: (425) 251-6955 Fax: (425) 251-6801 Houston Phone: (713) 460-0762 Fax: (713) 460-1510 St.

KJ

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

With Factory Installed

O~ 0.2 0.3 04 05 0.6 O~ 08 09 00 1000 2000 Auto drain Flow rate /min (ANR) Inlet pressure MPa (Float type normally open) AW4001-04 AW4001 -04 OOrain line should be Bmm or more and should be less than Sm. Be sure not to have any upward turns in the drain line which would prevent drainage. -0.25 H---''t' .:c ' +-+-t---+--r--.

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

45

Internal Wiring of Manifold 09 9 stations Serial type 45S3 16 16 stations This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet. G71-OD16 output no.

Ionizer Gun

Dimensions Ionizer (Standard nozzle) / IZG10--01 Power supply connector One-touch fitting Applicable tube O.D.: Table 1 Table 1 Models Applicable tube O.D. 8 (mm) IZG10-08-01 IZG10-09-01 5/16 (inch) 20 Doc. no.IZ*-OMX0012-B Ionizer(Bypass nozzle)/ IZG10--02 AC adapter / IZG10-CG The AC adapter and power supply cable (AC adapter) are a set.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

EXxx-OMN0027CN

Byte 19 0 1 0 0 1 0 0 1 Bit No. 05 09h(9 ) 6 (1) 7 (0) 07 7 6 5 4 3 2 1 0 Byte 20 Bit No. 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 89 7 6 5 4 3 2 1 0 Byte 21 Bit No. 0 18 1 19 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -75No.EX-OMN0027CN-D 3 12 1 7 6 5 4 3 2 1 0 Byte28 1 0 A Byte29 A Byte30 A 7 6 5 4 3 2 1 0 Byte61 1 0 L Byte62 L Byte63 L Bit No. 04 09

A_HEC-OM-J017

Data of UT and Check Sum Character data 09 ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH HEC 3-3 Details of Communication Format 4 Details of Communication Format 4-1 Temperature setting (without writing EEPROM) The host computer sets temperature of each Thermo-con. In this command, temperature setting data is not written in EEPROM.

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

Vacuum System Peripherals:

Made to order 09 9 Can accommodate up to 16 solenoids. When ordering the mixed specifications of single and double solenoids, specify the wiring. SUP/EXH block assembly mounting position ... ... U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

C95Series

Cushion Oimensioos Socket " ~ lrnm) val~~ across flats wrench WeiQht Table/Aluminum Tube (Ibs , Bore size (mm) . 32 40 .50 63 80 100 ~ 32,40 MB32 J~3lJOO3'spaMef\\W2.5 Bask: 1.23 1.85 3.06 4.20 7.08 9.33 Foot 1.58 2.29 3.8S 5.21 9.04 11.73 63,80 MB63 4mm J1$ 4548 100 10C1250 ~tm\ lPGMCfl,lmt 4 Basic weight Flange 1.67 2.35 4 .09 5.48 9.94 13.31 Single clevis 1.58

Valve Single Unit

Internal Wiring of Manifold 09 9 stations Serial type 45S3 16 16 stations This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet. G71-OD16 output no.

Valve Single Unit

Internal Wiring of Manifold 09 9 stations Serial type 45S3 16 16 stations This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet. G71-OD16 output no.

45

Internal Wiring of Manifold 09 9 stations Serial type 45S3 16 16 stations This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet. G71-OD16 output no.

CNG

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.