180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

) Bottom through hole dia. 5.1 (Mounting hole) 2 x M6 x 1 thread depth 12 (Mounting thread) 47 29 42 58 45 30 32 9 +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 30 4 x M6 x 1 thread depth 7 Rc 1/8 (G1/8, NPT1/8) (Finger closing port) 45 (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 32.9 20 20 51 11 11 Rc 1/8 (G1/8, NPT1/8) (Finger opening port) 25 13 MHW2-32D1 5 Right

CXT

1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

VT325

valve VO325-00 VP Port location/Port size Port direction P Exhaust port type P R A A R Base Base Base S070 Common Side Side/Bottom Side 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , Option Blanking plate (With seal, screw) DXT083-21A VQ VKF VQZ Accessory for Applicable Solenoid Description Manifold gasket Part no.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

3 Port Solenoid Valve SYJ300/500/700 Series

Valve Valve Base Base Base A port specifications Direction Top Top Bottom Bottom Side 1/4 NPTF 1/8 NPTF 1/8 NPTF 1/4 NPTF 1/4 NPTF P,R port 1/8 NPTF 1/4" onetouch fitting 1/8NPTF 1/8NPTF 1/8NPTF 1/8NPTF N7T Port size A port 5/16" onetouch fitting N9T X port Note 1) M5 0.8 M5 0.8 M3 0.8 Body ported type SYJ7 2/SYJ7 2R 10.6 (0.59) Note 2) Valve effective area mm2(Cv) 1/8:9.2 (0.51) N7T:8.8

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

39

8 t Rubber cover !0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

MRHQ

Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

IDX-OM-V020

. 7-5 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS . 8-1 8.3 AIR PIPING . 8-1 8.4 AIR FLOW CAPACITY . 8-1 8.5 AIR/ REFRIGERANT CIRCUIT . 8-2 Chapter 9 Option C . 9-1 9.1 SPECIFICATIONS . 9-1 9.2 PRECAUTIONS FOR INSTALLATION AND HANDLING . 9-1 Chapter 10 Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

30 1 M10 x 1.5 x 8 L (Hexagon socket set screw) 2 x 11 counterbore depth 6.3 36 Z 1 750.2 750.2 76 44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side

Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

High Pressure Coolant Valve

1.2 1.6 2.4 2.2 3.1 5.8 8.7 1.6 3.1 3.9 6.8 0.5 1.0 1.4 2.1 1.9 2.7 5.0 7.5 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8