ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

High Purity Fluoropolymer Needle Valve Series LVN 1

Body class Metric sizes Inch sizes LVC 4 6 8 10 12 1/8 3/16 1/4 3/8 1/2 2 LVA 3 LVH 4 Note) Refer to page 17-5-127 for information on changing tubing sizes. Basic size With reducer LVD LVQ Specific Product Precautions LQ Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-138 to 17-5-139 for High Purity Chemical Valve Precautions.

Ejector Valve Unit Series ZYY/ZYX 1

(Crimping tool: Model DXT170-75-1) ZSE1-16, -17 ZSE1--16/-17 ZP Brown DC (+) OUT1 (white lead wire, red LED) can be set with pressure setting trimmer 1 (SET1). OUT2 (green lead wire, green LED) can be set with pressure setting trimmer 2 (SET2).

HRX-OM-W004

MT.01 MT.01MT.05 MANT screen CODE No.16 Contact output signal 2 function RMT *1 D.OUT2 Setting function of contact output signal 2. screen SEL Contact output signal 2 operation No.17 A A/B D.OUT2 Setting output operation of contact output signal 2. screen TYPE D.OUT2 No.18 Contact output signal 2 alarm AL.01 AL.01AL.32 Setting selected alarm of contact output signal 2.

Nozzle Type Ionizer

D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26

Multi-Axis Step Motor Controller

Lock (+) B-1 Lock () A-1 Sensor (+) B-3 Sensor () A-3 Red 4 Black 5 Brown 1 Blue 2 17

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

HRX-OM-Z015

3.13.2 Circulating fluid discharge pressure .3-17 3.13.3 Status flag .3-17 3.13.4 Alarm flag .3-18 HRLE Series HRX-OM-Z015 Chapter 1 Read before using 3.13.5 Data display . 3-20 3.13.6 Circulating fluid set temperature . 3-20 3.13.7 Operation instruction . 3-20 3.13.8 Data instruction . 3-21 Chapter 4 Communication alarm function . 4-1 4.1 COMMUNICATION ALARM OCCURS . 4-1 4.2 COMMUNICATION

HRX-OM-I051

Check that the power supply to this system is compliant with the specification. 16 CPRSR Breaker Trip FLT Stop 17 Interlock Fuse Cutout FLT Stop An overcurrent was passed through the control circuit. Contact the system supplier for request of inspection and repair.

LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 M Weight g Weight g Model H2 H1 L1 L2 H1 L1 M H2 Model Full length L3 KK130P-50N -60N -65N -80N -85N -110N KK130S(L)-50N -60N -65N -80N -85N -110N 14 17 17 19 19 24 39.7 42.4 42.5 43.4 43.4 49.1 20.8 23.5 23.6 24.5 24.5 30.2 70.4 75.1 75.2 77.1 77.1 82.8 14 17 17 19 19 24 49.6 51.6 51.6 52.6 52.6 52.6 13.7 16.4 16.5 17.4 17.4 20.1 4.5 5.5 6.0 8.0 8.0

Ejector Valve Unit Series ZYY/ZYX

mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.

Model: 41 (AC), Bar Length: 40 (400mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage

Model: 40 (Standard), Bar Length: 160 (1600mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 8L (ø8 Elbow), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2)

Model: 40 (Standard), Bar Length: 82 (820mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 8H (ø8 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 5 (5m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller

Model: 40 (Standard), Bar Length: 70 (700mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 5 (5m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage

Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 4H (ø4 Straight), Plug Position: w/o Plug, Input, Output Specification: P (PNP), Power Supply Cable Length: 5 (5m), Bar Bracket: B (w/Bracket 1)

Model: 40 (Standard), Bar Length: 160 (1600mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 8H (ø8 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: N (None), Bar Bracket: w/o Bracket, DIN Rail Bracket for Controller &
High-voltage Power

Model: 40 (Standard), Bar Length: 160 (1600mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 8H (ø8 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: N (None), Bar Bracket: w/o Bracket, DIN Rail Bracket for Controller &
High-voltage Power