H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.
Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.
radius 80 3.4 13 4.5 6 Series ITV0 Dimensions Single unit for manifolds 56 50 PWR ERR M8 x 1 Cable connection threads 15 15 9 84 86 3.7 Breathing hole Note) (M3 x 0.5) OUT OUT port (4, 5/32") 8 2 5 18.5 Note) When used under the conditions equivalent to IP65, use the regulator after piping a fitting/tube into a breathing hole.
x 0.5 depth 5 2-1.2 (Guide air release) 9 + Stroke 5 [ 6.7] 20.5 20.5 20.5 3 5 28 29 9 2 [Auto switch] 2-M3 x 0.5 (port size) 6.1 + Stroke 8.4 6 9 12 14.5 10 2-M3 x 0.5 through 2-4.3 through Counterbore 8 depth 0.5 25 + Stroke 8 5 19 + Stroke 10.5 + Stroke [ 24.5] 4-M4 x 0.7 depth 5 2-2 through (Guide air release) 6 [ 6.7] 5 32 23 11 23 33 23 3 6 [Auto switch] 2-M3 x 0.5 (Bore size) 8.6
Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).
x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns
The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.
8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle
(ANR)) 4B 1B B AMF250 AMF650 AMF1000 1 4 0.1 MPa 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) 2B AMF350 AMF800/801 B 3 8 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 22 F1 OUT1 23 F2 OUT2 25 F3 Response time 27 F4 Auto-preset 28 F6 Fine adjustment of display value 30 F11 Display resolution 31
When hysteresis mode is selected: Refer to page 31. When window comparator mode is selected: Refer to page 32. When accumulated output mode is selected: Refer to page 33. When accumulated pulse output mode is selected: Refer to page 35. -30No.PF-OMP0002-H a. When hysteresis mode is selected Set value [P_1] or [n_1] and [the current set value] are displayed in turn.
Switching function of [F 0] Flow range, display unit and switch output specifications Page 31 Item Default setting Flow range 3000 L/min Display units 1 L Switch output specifications NPN 1: This setting is only available for models with the units selection function.
Setting of reversed output 1_P/1_N (page 29) * Input of set values Setting of Add/dEC P1AH/n2AH Setting of P1L/n1LP1H/ n1H/H1 (Page 30) Setting of P_1/n_1/H_1 (Page 30) P1dH/n1dH (Page 31) 4 Select display color SoG/ SoR/ Red/ GRN (page 33) 5.
, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31
In the latter case, up to 31 products can be connected. Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 RD RD 3 3 SD SD 5 5 SG SG Controller This product Do not connect any wire to other PIN numbers.
(1) (1) (2) (3) A O B (4) (5) /() 0.2 AB (6) 31 (7) 9. (1)(1.) (2) (3) (4) (5) 18 (1) (2) (3) IP65IP65 2.83.0Nm (4) (5) (6) (7) (8) 0 (1) (1) (2) (3) (4) (1) (2) (3) (4) 19 (1) (2) (3) 10 1. OUT1OUT2 OUT1OUT2 OUT2 OUT2 / +/ ( 8. ) ( 5. ) ( 7-3) 2.ON-OFF OUT1OUT2 ( 3-2-3 ( 4. ) ) 20 3. ( ) ( 8. ( 11-1 ) ) (A) (A): P2240112 4.
25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31
Internal parts are broken. 31 - Refere nce Problem Possible cause Solution page 23 29 30 Please confirm the presence of the wound in the cylinder inner wall after cleaning the inside of the cylinder.
Magnet A Magnet B Auto switch A Auto switch B Fig. 13 Auto switch operation principle -31- Maintenance and Inspection Periodic inspection is necessary for optimum use. Generally, annual inspection is recommended for the rotary actuator. Even if no problem is found, seal parts replacement is recommended every three years.