Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Electric Slide Tables

Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104 Sliding bearing Series LEL25M Ball bushing bearing Series LEL25L

Electric Grippers

Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104 Sliding bearing Series LEL25M Ball bushing bearing Series LEL25L

Digital Flow Switch (Integrated display type)

2 [dt2] Delay time setting 2 [0.00] 0.00 s [CoL] Display colour setting 2 [1SoG] ON: Green OFF: Red [F 3] [FiL] [FiL] Digital filter setting [1.0] 1.0 s Page 44 [F 4] [PrS] [PrS] Auto-preset function setting [oFF] Manual Page 45 -31No.PF-OMW0007-E Item Default setting Page [F10] [FLo] [FLo] Display mode [inS] Instantaneous flow Page 47 [F11] [drE] [drE] Display resolution setting [1000

Modular Type Regulators Series AR

(K) Rc 3/8 AR40(K)-06 Rc 3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500 1000 2000 3000 4000 5000 AC Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AF AR AL AW AG AV AF800 AF900 349 Series AR10 to AR60 Series AR20K to AR60K Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa, Outlet pressure

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

Modular/F.R.L. Units Series AC

1500 0 200 400 600 800 00 25 50 75 100 125 150 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC30 Rc3/8 AC40 Rc1/2 AC40-06 Rc3/4 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 1000 2000 3000 00 1000 2000 3000 4000 5000 0 0 Flow rate (l/min (ANR)) Flow

3

(with no condensation) 1000 VAC for 1 minute between terminals and housing 50 M7 or more (500 VDC measured via megohmmeter) between terminals and housing Insulation resistance Standards and regulations CE marking, UL (CSA), RoHS Note 4) When the temperature sensor PPS, Stainless steel 304, FKM, SCS13 is used, it will be 250 VAC.

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

PSxx-OMM0006CN

-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000

VQZ100V-OMT0001

/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 DC L,M L,M L,M L,M > > > > > > DIN DIN DIN DIN > > > YSYOS (YZ) ( ( ( ( ) ) ) ) 90 [ 0.1Nm ] 8 No.VQZ100V-OMT0001 VQZ Series/ / / / > > > (YZ) ) 1V (+-) () (1mm) 3.23.7mm 3 3 3 3 2 2 2 2 0.2~0.33mm 1.7mm [] () DXT170-75-1

SI unit for DeviceNet ®

Attenuation rate 1000 ft (max.) 28 / 1000 ft (max.) 17.5 / Conductor resistance 6.9 / 1000 ft (max.) 3.6 / 1000 ft (max.) Bus cable type Baud rate Total main line length Branch line length Total main and branch line length 500 kbps 100 m max. 39 m max. Thick 250 kbps 250 m max. 78 m max. 6 m max. 125 kbps 500 m max. 156 m max.

Pin Clamp Cylinder Series CKQ/CLKQ

(Between lead wire and the case) 1000 m/s2 300 m/s2 Impact resistance 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute 1) (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire and case) Withstand voltage Except magnetic resistant 2-color indication type solid state switch (DP5DWL/P5DWSC).

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

9.8

. -0.1 MPa (-100 kPa) 1/1000 1/100 (Only the displayed value is changed, and there is no effect on the accuracy.)

Water-cooledThermo-chiller

T xV x x C h x 60 x 1000 Q = 20 x 60 x 1.74 x 10 3 x 1.05 x 10 3 Q = T xV x x C h x 860 = 2436W = 2.4 kW 15 x 60 x 1000 = 20 x 0.06 x 1.74 x 10 3 x 0.25 0.25 x 860 Cooling capacity = Considering a safety factor of 20%, 2.9 kW (When the circulating fluid temperature is 50C.) 2.4 x 1.2 = = 2.4 kW (In this case, selected Thermo-chiller model will be the HRW008-H.)

Moisture Control Tube

0 0 200 400 600 800 1000 Kv value Volume ratio (Kv) (2) If your operating conditions are different from these basic conditions, apply a correction factor.

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10