Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
0 2 4 4.5 100% 0 2 4 4.6 102% 0 2 4 4.4 98% 0 2 4 4.5 100% Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.
Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)
22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A
0 kPa 5 kPa X580 10 kPa -10 kPa 0 kPa 10 kPa -60No.PS-OMV1001-C
Dimensions Body dimensions -61No.PS-OMV1001-C
Mounting brackets Bracket A Bracket B -62No.PS-OMV1001-C
Bracket C -63No.PS-OMV1001-C
Panel mount adapter Panel mount adapter + Front protective cover -64No.PS-OMV1001-C
Panel cut-out dimensions Single Pressure switch Two or more in a row n: The number of the Pressure switch
For connector with mark C, one piece of cylinder side connector (male) is enclosed. CE1 without connector can be directly connected to terminal block of counter. CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3.
Class B or equivalent (130C) Note) Coil insulation type Note) Based on JIS C 4003 How to Order 1 L 02 0 1 1 4 VS C Thread type Direct operated/Metal seal solenoid valve Electrical entry Nil Rc NPT NPTF Option 4, 5 port valve N Symbol Electrical entry Electrical entry position C T U D T Sub-plate Conduit Type of actuation Conduit with terminal Sub-plate Body size: 1/8 standard F Single
5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000
Class B or equivalent (130C) Note) Coil insulation type Note) Based on JIS C 4003 How to Order 1 L 02 0 1 1 4 VS C Thread type Direct operated/Metal seal solenoid valve Electrical entry Nil Rc NPT NPTF Option 4, 5 port valve N Symbol Electrical entry Electrical entry position C T U D T Sub-plate Conduit Type of actuation Conduit with terminal Sub-plate Body size: 1/8 standard F Single
Please put a new absorbent from the ditch of C type stop circle for the hole 10mm below. Please fill the absorbent while lightly giving happen the vibration. When filling the adsorbent, please to come to the center pipe. 6. Please put a new filter element and Panting metal sequentially. 7. please put C type stop circle for the hole in the ditch of case. 8.
V Reed switch Grommet 100 V or less IC circuit 100 V, 200 V 12 V Relay, PLC 200 V or less 2-wire 24 V Connector 24 V or less Grommet Diagnostic indication (2-color indication) Solid state switches marked with are produced upon receipt of order.
a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.
ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.
-X425 Environment Proof pressure (MPa) Low temperature High temperature 3.0 Ambient temperature (C) Maximum operating pressure (MPa) 30 to 60 5 to 80 2.0 Fluid temperature (C) Ambient and fluid temperature (C) 5 to 60 (with no freezing) 5 to 60 (with no freezing) Rubber parts Special NBR FKM Applicable Model Material Main parts Metal (Aluminum die-cast, etc.)
Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness
100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ
Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply
Polyurethane Tubing TU/TIUB Series RoHS KQ2 KQB2 20 m roll 100 m roll (TU1610 is reel.) 100 m roll, 200 m roll For general pneumatic tubing Flexible Polyurethane tubing Model/Specifications Option Manufactured upon receipt of order (Please consult with SMC.)
(TPH0806, TPH1075, TPH1209) 20 0 0 20 40 60 80 Operating temperature (C) 15-6-22 Clean Tubing: Soft Polyolefin Tubing Series TPS Model/Specifications 20 m bundle 100 m roll K TPS0425 Model TPS0604 TPS0805 TPS1065 TPS1208 O.D.
+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !