VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/702/705/710/ 725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9)

90

Note 17) Select when no pressure switch for vacuum, pressure sensor, or pressure switch for vacuum with connector without lead wire is used.

Digital Flow Switch (Integrated display type)

2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-01(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N1(

HRX-OM-M091

4.10.1 Circulating fluid discharge temperature . 4-17 4.10.2 Circulating fluid discharge pressure . 4-17 4.10.3 Electric resistivity/conductivity of the circulating fluid . 4-17 4.10.4 Status flag . 4-18 4.10.5 Alarm flag . 4-19 4.10.6 Circulating fluid set temperature . 4-20 4.10.7 Operation Start Command . 4-20 Chapter 5 Simple communication protocol function . 5-1 5.1 Precautions for

Refrigerated Air Dryer

Using the equipment outside of the specified range could cause it to become damaged, malfunction, or operate improperly. 17 19 Series IDF/IDU E /Specific Product Precautions 1 Air Preparation Equipment Refer to pages 15 to 17 for safety instructions and cleaning equipment precautions.

HRX-OM-R028

HRSH Series 4.10 Register Map 4-17 HRX-OM-R028 Chapter 4 MODBUS communication function 4.10.3 Status flag The status of the product is read by the following assignment.

VNC

Description VNC811-65F VNC911-80F Plate assembly Valve material i Pilot solenoid valve VN8-A3CA VN8-A3CB VN9-A3CA VN9-A3CB e FKM NBR VO301-00T-X302 (Refer to page 17-4-29 for part no.) 17-4-28 9 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 VO301-00 T X302 SF4 1 D Z 23 Manual override Nil A B Coil rated voltage

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

EXxx-OMN0035CN

No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

DOC1003626

Analog output signal 2 Output Circulating fluid discharge temperature signal *4 11 Analog output signal 1 Output Circulating fluid discharge temperature signal *4 12 None Can not connect *3 13 None Can not connect *3 24 COM output (Common of contact input signal) 14 Output 15 Common of contact output signal 1, 2, 3, 4, 5 Output 16 Contact input signal 2 Input External switch signal *1 17

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 18.5

Fieldbus system Digital unit

No.EX-OMN0036-B PRODUCT NAME Fieldbus system Digital unit MODEL / Series / Product Number EX600-DX## EX600-DY## EX600-DM## Table of Contents Safety Instructions 3 System Outline 9 Assembly 10 Mounting and Installation 12 Installation 12 Wiring 14 Digital input unit Model Indication and How to Order 17 Names and Functions of Product 17 Mounting and Installation 20 Wiring 20 LED Display 25

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

7

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.

HRX-OM-W069

Analog output signal 2 Output CH2 Circulating fluid electric conductivity signal 1 11 Analog output signal 1 Output CH2 Circulating fluid discharge temperature signal 1 12 None Can not connect 13 None Can not connect 24 COM output (Common of contact input signal) 14 Output 15 Common of contact output signal 1, 2, 3, 4, 5 Output 16 Contact input signal 2 Input External switch signal 1 17

CRBB-OM00004

When the screw tightening torque is not specified, the tightening torque shall be approx. 0.49 Nm. 17 No.

SI unit ( device)

5 0x0017 (23) 0 R Software Revision N FW-Vx.y 5 (24) 0 R/W Application Specific Tag Y "* *" 6 0x0018 Refer to page 17 "Device State parameter" for details 0x0024 (36) 0 R Device State N Refer to page 17 "Detailed Device State parameter" for details 0x0025 (37) 1..8 R Detailed Device State N 1: Where R is Read and W is Write. 2: Where Y means included in DataStorage and N means Not included