Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only) 20 Sensitivity of leak current mA 30 Rated operating current Note 5) A 15 8 Rated power consumption Note 5) kW (kVA) 4.6 (5.2) 5.0 (5.6) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 66 Accessories Alarm code list stickers 2 pcs.
40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134
3 q Size w Motor mounting position r Lead [mm] e Motor type Symbol LEY25 LEY32 A 12 16 B 6 8 C 3 4 25 32 Symbol Type Size Compatible controller/driver 25 32 Nil Top mounting D In-line LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) A Servo motor (24 VDC) LECA6 t Stroke [mm] y Motor option u Rod end thread Nil Without option B With lock Nil Rod end female thread 30 30 to to 500
Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. Mounting B L F G C D Basic Foot Rod flange Head flange Single clevis Double clevis Auto switch Nil Refer to the below table for applicable auto switch models.
Card Motor Series LAT3 RoHS How to Order 1 N 1 D LAT3 10 Sensor resolution Nil Controller mounting Nil 30 m DNote 3) Screw mounting F 1.25 m DIN rail mounting I/O cable lengthNote 2) Stroke Nil 10 20 30 Without cable 10 mm Note 1) Refer to page 3 for detailed specifications of the controller. Note 2) If Without controller has been selected, the I/O cable is also not included.
Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc. "n" pcs.
Port Note 2) Lever detection switch type Direction of transfer R Type E2E-X1C1 E2E-X2D1-N Applicable model RSH 20, 30 RS1H 50, 63, 80 10-9-4
Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
4.4 0.33 4 2.2 -4.0 1.91 1.29 0.05 0.07 2.5 1.0 1.8 15 0.45 0.75 11.2 33.5 Ambient and fluid temperature Port size (PT) 32 140 F (0 60 C) 1/8 3/8 Lubrication Not lubricated (Note 1) Change in potential energy applied to a pendulum (Note 2) Total weight including the mounting base and bolts How to Order XT316 40 B Base B With base Without base Bore size 30 40 63 80 100 30 40 63 80 100 Air
68.3 79.6 Total width [mm] 8.5 11.2 19.0 23.6 Bracket total length [mm] 10.0 11.5 23.0 27.3 Case material Polycarbonate *1 Flow rate (positive pressure) conditions: Supply pressure of 0.7 MPa, Pressure drop of 30 kPa 3
The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity.
The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity.
The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity.
C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity.
It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.
Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1NR (1 + N + R)
Size: 30, Thread Type: N (NPT), Port Size: 03 (3/8), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 30, 40), Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and
Body Size: 30, Thread Type: N (NPT), Port Size: 03 (3/8), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 30, 40), Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate
Special Application: 21-AF (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 30, Thread: N (NPT), Port Size: 03 [3/8 (Size 30, 40)], Bracket: None, Bowl Type: 8 [Metal w/Level Gauge (Size 30 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]