9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Electric Actuator Triple Axis P&P Unit

Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x

CV/MVGQ

[129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14 12 15 0 0.022 8 85 73 61 52.5 M10 x 1 9.5 12.5 M5 x 0.8 40.5 28 8 5 20 18 15 0 0.022 10 Single Acting, Spring Return/Axial Foot Style (L) CVJ3L S Bore size Stroke 48 [49] 28 [34.5] M5 x 0.8 M5 x 0.8 Manual override Width across flats B1 Rod End Nut

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

AS-FPQ/AS-FPG

-17-4 5 Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts No.

AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

PBT PBT/Stainless steel HNBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated M5 port only Note 1) M5 type, AS321-02 type: Electroless nickel plated.

Rotary Actuator

Also, if pipe tape is used, as in Fig. (11), leave 1.5 to 2 thread ridges exposed at the end of the threads. Operating air Air supplied to the rotary actuator shall be cleaned by the filter. CRA1 series is lubrication free.

Parallel Type Air Gripper

Refer to the Material Safety Data Sheet (MSDS) of the hydraulic fluid when supplying the fluid. 11 - 3. Maintenance 3-1. Precautions Warning 1. Maintenance should be performed according to the procedure indicated in the Operation Manual. If handled improperly, malfunction and damage of machinery of equipment may occur. 2. If handled improperly, compressed air can be dangerous.

Regulator Valve

The value of the residual pressure can be checked using the outlet pressure gauge. 11.

MGF

Also make sure that the rotational torque applied to the cylinder body does not exceed the allowable rotational torque (given on page 11). (Otherwise, the excessive rotational torque will damage the non-rotating mechanism and lead to a malfunction.) 6.

CC

J D-X 20Data 10-17-11 Series CC Maximum Driving Speed of Cylinders (Speed controller) If intricate speed control is unnecessary and the changes in speed due to load fluctuations can be tolerated, the pneumatic speed controller can be used as a control valve. The minimum controllable flow volume of the speed controller is 3 dm3/min.

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

x 0.8 11-/12-: Fluorine grease 21-/22-: Lithium soap based grease Grease 12-: Class 4, 21-: Class 5 Cleanliness class (ISO class) 11-/22-: Class 3 The maximum piston speed shown in the table above applies to the extension side.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 14 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 NDH10 U1 NX R1 Part no. +0.048 0 Y-J010SUS 3.3 3.2 8 10 +0.048 0 Y-J016SUS 5 6.5 12 10 Rod end cap T-bracket

AS-FPQ/AS-FPG

5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.