Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Directional Control Driver for Electric Cylinder

size 3) DC motor (cylinder size 5) Option Cable for power supply terminal LC3F2 1 C1 02 1 CN1 Power Supply Terminal Table 2 3 1 Optional cable color Terminal Function Pin number Cable type Cable length 01 02 1 m 2 m Yellow/Green FG Frame ground 1 Cable for CN1 power supply terminal C1 Cable length 60 5 60 5 2 Brown DC (+) Driver power supply (+24 V) Cable for control terminal LC3F2 1 C2

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

100

Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

CRBU

(If not specifying dimension C2, indicate instead.)

Smooth Cylinder/Low Speed Cylinder

NPT, G) Mounting hole Width across flats B1 C2 FY D E I B MM AL A Z FT N H 2 x FD FX FZ Effective thread length 2 x FL 1.5 Width across flats NA Width across flats KA Mounting hole 40 K N 20 to 32 F S + Stroke ZZ + Stroke Boss-cut style ZZ + Stroke (mm) B D FL FD K KA N NA NN P S A B2 C2 H2 I B1 E F FT MM Z AL FX ZZ FY FZ G H H1 Bore size (mm) 0 0.033 20 15.5 13 26 30 10.5 5 8 M8 x 1.25 M20

Step Motor Controller

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Cable color Connector pin No.

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

PSE550/300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 C2 Note 1) Current output type cannot be connected to the Series PSE300. Note 2) The connector is unassembled in the factory but is included with the shipment.

5-Port Solenoid Valve

2 One-touch fitting 84 Double 94 2-position Single 82 Double 91 SY3l31-C2 3-position Closed center 98 Exhaust center Pressure center C2 2 One-touch fitting 3-position Closed center 95 Exhaust center Pressure center 4-position Dual 3-port valve 91 SY3l30-C2 2-position Single C3 3.2 One-touch fitting 87 Double 97 Metal seal SY3l31-C3 2-position Single 85 Double 94 3-position Closed center

3

Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached near one end CKQ = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached at the center of gravity 5.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed switch) D-M9 (Solid state switch) D-M9 Specific product precautions Be sure to read before handling.

PSxx-OMT0001CN

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Compact Rotary Actuator Series CRQ2

L1 (3 x P) Q1 = M C2 = C Y = C1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = DD2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 L1 max X 2 X 2 L2 max Y Y Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 257 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

DM

Number of connecting tubes Accessory (Option) How to Use 6 12 Nil C1 C2 None Cover single side 1 pc. Cover both sides 2 pcs. 6 12 Caution K Disassembly (1) Loosen clamp ring and disassemble the connector into the plug case and socket case. Style Tubing O.D.