Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in), Mounting: F (Flange), Bore: Ø16 (5/8 Inch), Stroke: 300 (3 Inch), Action: S (Spring Return), Port Location: Perpendicular, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Basic), Bore: Ø16 (5/8 Inch), Stroke: 300 (3 Inch), Action: T (Spring Extend), Port Location: Perpendicular, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 075 (3/4"), Stroke: 300 (3"), Body Option: Standard (Rod End Female Thread), Auto Switch: A96--Reed, DC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 300 (3"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 300 (3"), Stroke: 125 (1 1/4"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Z (Super Compact), Bore Size: 056 (9/16"), Stroke: 300 (3"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 300 (3"), Body Option: M (Male Rod End), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector), Number: S (1 pc.)

Style: H (Single Axis Type), Size: 25, Motor Mounting Position: Top Mounting, Stroke: 300, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 5 (5m), Controller Mounting: D (DIN Rail Mounting)

Style: H (Single Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 300, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail Mounting)

Size: 32, Motor Mounting Position: Top Mounting, Stroke: 300, Motor Option: w/o Option, Stroke Adjustment Unit: None, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail Mounting)

Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 300, Motor Option: B (w/Lock), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 2P [LECP2, Programless Type (w/Stroke Study), PNP], I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail Mounting)

Size: 25, Motor Mounting Position: Top Mounting, Stroke: 300, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 2P [LECP2, Programless Type (w/Stroke Study), PNP], I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail Mounting)

Lock: L (With Lock), Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: B (Same Side as Port Location), Bore Size: 50mm, Port Thread: Rc, Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: H (High Type), Shim: None

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: C (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (270° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: D (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: B (90° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: D (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: D (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: E (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (270° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: E (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (270° From Port), Clamping Height: L (Low Type)