EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield Output interface Output interface Short circuit Short circuit protection protection Output circuit / Output circuit / Bus interface Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 12-3 EX245-DY1 79

CL

wire Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN

LEF-OM006xx

16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 56.4 (DC24V) A/B 800 / (V) DC2410% (W) 4) 100 (W) 5) 43 (W) 6) 141 7)

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

VQ7-6/7-8

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

12 V Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 12 V Yes No Yes No 100 V Reed auto switch Relay, PLC IC circuit 100 V or less Grommet 24 V 2-wire 12 V 100 V, 200 V 200 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

BP1000

Pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) No code P 01 02 10 20 30 Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Lubrication Equipment

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. AC AV Design Warning AU qEpoxy resin containing glass fiber and polycarbonate is used in some parts of the D.P. Lube and the D.P. Lube Unit.

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

AC Servo Motor Driver (CC-Link Type)

(N) and (P+) (N-)) of the main circuit converter is displayed. 0 to 900 V 19 Station No.

Compact Cylinder with Solenoid Valve/

V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V, 12V 3-wire (PNP) 2-wire 12 V A96 A93 A90 A96V A93V A90V IC circuit 5 V 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

VQZ100V-OMT0001

P P P R R R R DIN DIN DIN DIN ISO#:EN ISO#:EN ISO#:EN ISO#:EN-175301 175301 175301 175301-803 803 803 803C C C C( ( ( ( DIN DIN DIN DIN 43650C)( 43650C)( 43650C)( 43650C)( 8mm) 8mm) 8mm) 8mm) DIN IP65() () 90 :3.57 ()JIS.C3306 0.5mm 2 3 1(p)3R2R5R1 3(R2 3(R2 3(R2 3(R2 R) R) R) R) 5(R1) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06

AC Servo Motor Driver (CC-Link Type)

(N) and (P+) (N-)) of the main circuit converter is displayed. 0 to 900 V 19 Station No.

VQ7-6/7-8

3/8 Seal FHG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Option FJG Nil Z V None Light/Surge voltage suppresor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) When two or more symbols are specified, indicate them alphabetically.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

AC Servo Motor Driver (Pulse input type/Positioning type)

Power supply voltage is 200VAC single phase OFF Trouble ON RA MC SK (Note 5) Forced stop MC Servo motor Servo amplifier Driver CNP1 (Note 6) MC NFB Main circuit power supply 1-phase 200 to 230VAC L1 (Note 4) U L2 U Motor P V V [1] M C W W Built-in regenerative resistor (Note 1) [2] [3] CNP2 (Note 2) Circuit protector Encoder CN2 Encoder cable +24V Control circuit power supply 24VDC (Note

HRX-OM-R016

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

HRX-OM-R005

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-R005 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.