Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Symbol Manifold Without port Nil 0 2 3 5 Filter only Vacuum pressure switch 0 1 2 3 4 5 Without fitting (M5 x 0.8) Without fitting (M5 x 0.8) VVQ1000-50A-M5 KJS04-M5 4 (Straight) 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 Single unit KJS06-M5 6 (Straight) 4 (Straight) KJS04-M5 VVQ1000-50A-C4 KJL04-M5 4 (Elbow) 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65 58 20 102 93 82

Electric Slide Tables

/24 VDC) LES LESH A 2 72.5 10.5 9.5 5.1 29 24 22.5 2.5 45 A 37 9 35.5 5.5 13 D x M5 x 0.8 thread depth 6.5 Note 4) (D/2 1) x C C 19 3 x M5 x 0.8 thread depth 8 Table operating range Note 1) 1 [1] 8 K Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) LECA6 LECP6 LEC-G LECP1 LECPA 16.5 N 13 (M) Stroke (2.3) 4H9 ( ) depth 4 (G 1) x F 18 F +0.030 0 40 (25) 5 J +0.030 0 4H9 ( ) depth 4

SMC Pneumatic Clean Series

B F MM NA GC GA C A M12 x 1.0 M10 x 1.0 NN M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 10112122Axial foot style (L) / CJ2WL, CJ2WL GA GC Piping port 4-M5 x 0.8 MM NN GC NN F GA F MM Cover surface D D LY LB LH X A Y Y X LX A NA NA LZ H S + Stroke H + Stroke Z + 2 x Stroke 2-LC Mounting hole (mm) 16 10 15 15 5 4 8 8 11 11 28 28 23 21.5 5.5 5.5 2.3 2.3 GA LC Bore size

Auto Switch Guide

x 0.8 x 16 MVGQ M5 x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland J D-X G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 20Hexagon socket head cap bolt Hexagon socket head cap bolt Data Indicator

SMC Pneumatic Clean Series

x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 10112122Axial foot style (L) / CBM2L, CBM2L H Relief port M5 x 0.8 24 2-P (Rc, NPT, G) A K F AL H2 F DL 2-NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4-LD 2-LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing

CL

x 1.5 l m t Applicable snap ring Part no.

3 Port Solenoid Valve

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 12 Flow characteristics 23 Valve model C[dm3/(s bar)] 0.037 0.076 0.054 0.099 C[dm3/(s bar)] 0.054 0.099 0.037 0.076 b 0.11 0.07 0.35 0.23 b 0.35 0.23 0.11 0.07 Cv 0.008 0.016 0.015 0.024 Cv 0.015

Speed Controller with Indicator

13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5

Valve Single Unit

(Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 5-Rc 3/8, 1/4 02 03 02 03 L plug connector (L): SX7140(R)-LM plug connector (M): SX7140(R)-MManual override (Press and turn for the locking type.)

Compact Cylinder with Lock Series CLQ

Carbon steel 16 For 50 or larger only 821 Series CLQ Dimensions: 20, 25 Basic style (Through-hole/Both ends tapped common): CLQB20/25 Extension locking LOCK M5 x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Flat Ribbon Cable Assembly 2 x M2.6 x 0.45 Cable length (L) 10 pins 20 pins 26 pins AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 1.5 m 3 m 5 m D-sub Connector Cable Assembly Cable Color List of Each Terminal No. Terminal no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

CL

x 1.5 l m t Applicable snap ring Part no.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

VS 8-2/VS 8-4

1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 1/8" 4(A), 2(B) port (n-1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 45 L1 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 Circular connector cable assembly AXT100-MC26-015 :1.5 m AXT100-MC26-030 :3.0 m AXT100-MC26-050 :5.0 m 4 x M5 mounting holes