Series VCS

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Compact Type Dual-Rod Cylinder Series CXSJ

Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide

ZPT/ZPX

63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width across flats 60 70 4-M5 x 0.8 I 11 H G F E Y 4 40 C A B D Dimensions (mm) Model B A C D E F G H I J Y ZPX100HBJ25-B01-A22 141.5

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

O.D.: 3.2 (VAC. port) KJS23-M5 Applicable tubing O.D.: 4 (VAC. port) KJS04-M5 Applicable tubing O.D.: 6 (VAC. port) KJS06-M5 16.5 15.5 16.38 15.3 15.6 KJL23-M5 KJL04-M5 8.4 9.3 Applicable tubing O.D.: 3.2 (VAC. port) Applicable tubing O.D.: 4 (VAC. port) 10.6 10 P port (for ejector) Applicable tubing O.D.: 4 (P. port) KJS04-M5 Applicable tubing O.D.: 6 (P. port) KJS06-M5 16.38 15.5 Applicable

F

P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead S With sealant (all male threads except M5) C O N N E C T I O N T H R E A D M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 00 Same dia. tube 99 Stem fitting P R O D U

Compact Cylinder with Lock Series CLQ

x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port

CJ2

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J MM NN R FC FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 M3 x 0.5 7 3.4 1.6 24 16 32 M10 x 1.0 10 10 12 15 17 5 13 8 6 7 20 7 M4 x 0.7 8 4.5 1.6 28 18 37 M12 x 1.0 15 12 14 20 19 6 15.5 10 6 7 24 9 M5 x 0.8 10 5.5 2.3 36 22 49 M14 x 1.0 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

CU

through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard

Vacuum Gripper

Release pressure supply port (PD) Release Button Plug (Part No.: KQ2P-04) Air pressure supply port (P) Applicable tubing O.D.:4 Silencer exhaust EXH. Digital pressure switch ZSE20---M5-LA2 PD P # P V Circuit diagram -14No. TQ1230001-OM106-B 5. Dimensions 5.1. Vacuum Gripper 60(Operating range 50 to 70) 60(Operating range 50 to 70) * Cup distance is changeable. -15No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

6.5 29 32.5 3H9 3 15.5 3H9 3 7 912 Rotary Table MSQ 1122Dimensions: Size 10, 20, 30, 50 Basic type: MSQBA 1122XB effective depth XC WB effective depth WC 2 XA 8 x WD depth WE (Circumference: 8 equivalents) 4 x JJ depth 8 WA 2 2 x J through JA counterbore depth JB 45 22.5 BE WF WF BD 2 x M5 x 0.8 Port (Plugged) Effective depth FB DD M5 x 0.8 depth 5 (Vacuum suction port) D BB DE 2 x P Port

RZQ

(Example) Bolt M5 x 110l (Two bolts are necessary per cylinder) RS Q G RS H A RZQ Rod side mounting Head side mounting MI W S CEP1 CE1 CH CR CE2 Attached B-type washer D D ML2B C J G5-S CV MVGQ C 50, 63 CC Note) Use the attached washer when inserting the bolt from the rod side.

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Refrigerated Thermo-chiller

P. 192 Refrigerator P. 192 Relay P. 198 Relief valve P. 195 RS232C P. 198 RS485 P. 198 RTD (Resistance Temperature Detector) P. 196 S Sealing mechanism P. 194 SEMI F47 P. 199 SEMI S2 P. 199 SEMI S8 P. 199 Signal input/output, I/O P. 199 Solenoid valve P. 195 Solid state relay (SSR) P. 198 Specific heat/Specific heat capacity P. 195 Specific resistance P. 195 Specified CFC P. 192 SV P. 196

MGC

R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

s m 2.

VHK

(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.