SMC Corporation of America
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ARM5B R 06 A Individual Supply Type 3. Semi-standard 1.

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

13.7 1/4" 28 21 4 9.3 14 10 12.5 3.5 AS2001F-06-3 AS2001F-03-3 44.8 6.3 21.8 49.1 43.6 9.3 40.7 13.5 12.7 20.7 48 42.5 5/32" 5.2 29 28 6 11.6 AS2051F-06-3 AS2001F-05-3 53.2 6.7 25.7 53.5 48.1 11.4 50 17 16.5 21.6 48.9 43.4 3/16" 6.2 49 34 14 10 3.5 12.5 6 12.8 17 13 15.5 3.5 AS2051F-08-3 AS2001F-07-3 59.8 8.1 27 54.8 49.4 13.2 52.2 18 17 22.5 49.8 44.3 7.1 1/4" 54 37 8 15.2 AS3001F-06-3

slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06

Roller plunger VZM450-01-06 VZM450-01-06S Panel mounting hole 12 polyacetal or hard steel roller Hexagon nut thick 8, across flats 22 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2-3.5 mounting hole 2.0 mm O.T. 3.5 mm T.T. Toggle lever VZM450-01-08 T.T.

Configuration Data (SI) Index Name / Meaning Type Value 80x0:0 Slot x: Module identification USINT 10 80x0:01 Address of the module UINT Slot No. 80x0:09 Module PDO group UINT 2 80x0:0A Module ident DINT Unit ID 80x1:0 Slot x: Unit Parameters USINT 8 80x1:02 Monitor short circuit (out) Enum0807 0=Disable 1=Enable 80x1:06 Restart after short circuit Enum0808 0=Manual 1=Auto Monitor 24V_C /

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS090

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRSH

FGDTF*-06 (5) FGD-CV006-03 FGDCE*-03 FGD-CV006-04 FGDCE*-04 FGD-CV006-06 FGDCE*-06 FGD-OP001 FGD*B (10) KT-FGDC FGDC KT-FGDE FGDE (2)(4)(6)(13)(16) KT-FGDT FGDT KT-FGDF FGDF FGD-CA002 FGDT,F(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

FGD-KT002 FGDE Nut kit FGD-KT003 FGDT FGD-KT004 FGDF FGD-CV005-03 FGDT,F-03 FGD-CV005-04 FGDT,F-04 FGD-CV005-06 FGDT,F-06 Replacement cover (5) FGD-CV006-03 FGDC,E-03 FGD-CV006-04 FGDC,E-04 FGD-CV006-06 FGDC,E-06 Joint FGD-OP001 FGDB (10) KT-FGDC FGDC Each of (2)(4)(6)(13) and (16) are provided as a kit.

CA1 3 wire (Equiv. to NPN) 5V A56 IC CS1 Yes Reed switch Solid state switch 32,40 BT-03 A53 A54 A67 A64 A59W F59 F5P J51 J59 F59W F5PW J59W F5BA F5NT F59F 12V 5V,12V 100V,200V Grommet Relay PLC 24V 2 wire 5V,12V IC No 200V or less 12V Diagnosis indication (2 colour) Yes 3 wire (NPN) 50,63 BT-05 IC 5V,12V 24V 3 wire (PNP) 100V,200V 2 wire 12V 3 wire (NPN) IC 5V,12V 80,100 BT-06

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

AS2001F-03 AS2001F-06 13 28.7 33.7 6.3 44.8 11.6 6 13.5 11.8 18 28.6 33.6 6.2 50 11.4 16.5 3/16" AS2001F-05 AS2051F-06 26 30.2 35.2 6.7 53.2 12.8 6 17 14.8 21 29.5 34.5 7.1 52.2 13.2 17 1/4" AS2001F-07 AS2051F-08 31 31.5 36.5 8.1 59.8 15.2 8 18 24 29.6 34.6 6.2 52.2 11.4 16.5 3/16" AS2051F-05 AS3001F-06 18 33.3 38.3 7.4 59 12.8 6 17 14.8 26 30.5 35.5 7.1 54.4 13.2 17 1/4" AS2051F-07 AS3001F

06, 07 10 6 4 500 5 2 0 5 10 0 0 0 5 10 Needle rotation (Turns) Needle rotation (Turns) 4.1-14 Series ASD Dimensions/Metric Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D.d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Metric L4 L5 A1 A2 M MAX.

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

Voltage Number of output points 06 10 D D-6 A 24 to 48 VDC 6 output points 12 VDC 10 output points 85 to 220 VAC Specifications 06 10 VXFC D 06 10 VXFC A 06 10 VXFC D-6 85 to 220 VAC 24 to 48 VDC Model Input voltage 12 VDC Output voltage Same as input voltage 0.01 to 0.99 sec ON Time setting 0 to 299 sec OFF p2% Time accuracy Number of outputs 6 to 10 points 0 to 50oC (No condensation allowed

How to Order Integrated Display Type H PF2A7 Flow rate range Unit specification High flow rate type Wiring specification 150 to 3000l/min 300 to 6000l/min 600 to 12000l/min 03 06 12 Nil M With unit switching function Fixed SI unit Note) Port specification Nil N 3m lead wire with connector Without lead wire Nil N F Rc NPT G Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l,