Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22
Memory map of output data Data (2 byte) Output area Branch connector (OUTPUT) MSB LSB MSB LSB 15 8 7 0 byte (d) byte (d+1) Word(c) COM A byte (d+2) byte (d+3) Word(c+1) COM B byte (d+4) byte (d+5) Word(c+2) COM C byte (d+6) byte (d+7) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size Port Thread Code 1 Size 1 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1
(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.
7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I
Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 Series IF3 Flow Rate vs.
) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (
(Signal name on the table: COM A, COM B, COM C, COM D) 0: Normal 1: Abnormal Error state flag 0: Normal 1: GW unit is in start or stop condition Remote READY 1: GW unit is in start condition 3 stations occupied I/O memory map (in case of station No.1) Ex.)
Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 L x 3 + 200 3 to 40 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 52 1 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 52 L x 3 + 200 N x 20 L x 5.3
sensor PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Vacuum break flow adjustment needle Supply valve Supply valve EXH EXH Release valve Release valve Release valve Manual override V V Exhaust A Vacuum pump system/Manifold 1.1 1.28 ZZB-SM5 ZB0030-K1L(O)-P D side U side 1 3 Stations 1 2 3 4 D side U side n 1 Stations n 1.535 (Fully open: 1.67) Pressure
Body Ported Plug Lead Unit Connector Kit How to Order Manifold Series VV5QZ 1 2 08 C DIN rail mounting None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO VQZ1000 VQZ2000 VQZ3000 1 2 3 (1) Note 1) Order DIN rail separately.
(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.
63 80 100 MGTL D-Y5 type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.
Bore size (mm) Auto switch model 20 25 32 40 D-A9 D-M9 D-M9 W Note 1) qBM2-020 wBJ3-1 Note 1) qBM2-025 wBJ3-1 Note 1) qBM2-032 wBJ3-1 Note 1) qBM2-040 wBJ3-1 D-C7 /C80 D-C73C/C80C D-H7 D-H7 W D-H7BAL D-H7NF BM2-020 BM2-025 BM2-032 BM2-040 D-B5 /B64 D-B59W D-G5NTL D-G5NBL D-A3 A/A44ANote 2) D-G39A/K39A BA2-020 BA2-025 BA2-032 BA2-040 BM3-020 BM3-025 BM3-040 BM3-032 Note 1) Two kinds of auto
1/16") 106 (1-1/16") 125 (1-1/4") 125 (1-1/4") 150 (1-1/2") 150 (1-1/2") 200 (2") 200 (2") Auto Switch Mounting Position (NCDMC, NCDME) (in) Auto Switch Mounting Position (NCDMC-*C, NCDME-*C) (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-G5NTL D-B5 D-B64 D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-G5NTL D-B5 D-B64 D-B59W D-B59W
U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.
4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867