Step Motor Controller B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.
PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S
speed] 1 *1) 1 mm/s (0023)h Return-to-origin acceleration and deceleration [ORIG ACC/DEC] 1 *1) 1 mm/s2 (0024)h Creep speed 1 Fixed value 1 mm/s Origin sensor [ORIG sensor] Upper-level byte 0 to 2 1 mm/s2 (0025)h ORIG switch direction [ORIG SW DIR] Lower-level byte Fixed value (0026)h Undefined parameter 21 1 Fixed value 40 - JOG motion data addresses (motion parameter items) Controller
S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!
S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!
Valve side Chamber Bellows side Vacuum pump Recommended direction of pumping 11 XL-OMM0005-A 7 Parts Replacement Procedure Replacement procedure Division 1 Model High Vacuum Angle Valve Step 1 Step 2 Step 3 Step 4 Step 5 Step 6 3 Screw for fixing valve S assembly Bottom of gas release 1 2 Valve S seal assembly 4 Solenoid valve for main pumping 1(P) SUP Solenoid valve for initial pumping 1
0.024 0.008 0.016 V114 V114A V124 Note 1) V124A Note 1) Note 1) For both V124 and V124A, pressure from port 3 and exhaust from port 1.
Flat Ribbon Cable Type 21P Applicable solenoid valve How to Order 1 3 5 6 4(A), 2(B) port Stations VV4Z1 05 21P VZ1120MOZ-M5 Applicable blanking plate assembly DXT170-25-3A Applicable connector assembly DXT170-127-A 1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
G H L LN LO M MN MO L type plug connector M type plug connector Proper Combination of Blank Plate Ass'y and Manifold Base Blank plate ass'y SYJ3000-21-1A Blank plate ass'y SYJ3000-21-2A Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SYJ3000-33 -2 (M1.7 7, Non-gloss nickel plated) Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 Phillips head screw SY100
Double solenoid V110N-D5MOZConnector assembly (for junction common) SJ3000-46-SC Single solenoid V110N-S5MOZConnector assembly (for junction common) SJ3000-46-DC Common wiring Connector assembly SJ3000-46-S (Example) VV100-10-04U1-C6 1 set V110N-S5MOZ-C4 2 sets V110N-D5MOZ-C4 2 sets SJ3000-46-S 1 set (Connector assembly for single solenoid) SJ3000-46-SC 1 set (Connector assembly for single
SYJ500 SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
) PD20 (LSP)(LSN)OFF PD20 PD20 (LSP)(LSN) 0 1 2 3 (LSP) (LSN) 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m
e l H ZZ f h ZZ C85 84 1/4 51 186 43 11.2 59 1/4 stroke 194 40 202 C95 50 90 3/8 58 206 52 11.2 66 1/4 stroke 214 222 63 98 3/8 58 214 52 11.2 66 1/4 stroke 222 230 CP95 80 116 1/2 71 258 65 12.5 80 1/4 stroke 267 276 100 126 1/2 72 270 65 14.0 81 1/4 stroke 279 288 NCM Axial Foot Style: CA2WLH NCA S + Stroke H H + Stroke 2-P (Rc, NPT, G) K A G G F K A F B1 4-J AL AL Width across flats KA
Rc NPT G Nil TN TF Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.
Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).
1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l
N 1 * S 1 5 T L A N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k
Metric size Inch size 6 8 10 12 19 25 4 3 Series 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Appearance Class 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 Space saving union elbow LQ1E-S SMC LVC P.908 LVA Space saving union tee LQ1T-S LVH SMC LVD P.908 LVQ Space saving panel mount union LQ1P-S LVP LVW P.908 LQ1 LQ1 Space saving union LQ1U-S SMC LQ3 LVN P.908 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1