LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

HEC-OM-S008

01 03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][

VZA2000

0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position 1/8 Body side M5 x 0.8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

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Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB)

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1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA,

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB)

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

VS 8-2/VS 8-4

For Rc 1/8" AXT954-01 For Rc 1/4" AXT954-02 For Rc 3/8" AXT954-03 For Rc 1/2" AXT954-04 For NPTF 1/8" AXT954-01T For NPTF 1/4" AXT954-02T For NPTF 3/8" AXT954-03T For NPTF 1/2" AXT954-04T For G 1/8" AXT954-01F#1 For G 1/4" AXT954-02F#1 For G 3/8" AXT954-03F#1 For G 1/2" AXT954-04F#1 This is used to plug the cylinder ports when using as a 3-port valve, etc. 26 Series VS 8-2/VS 8-4 S R S R

EXxx-OMW0014CN

8 error 0Module 8 1Module 8 Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01 1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

4/5 Port Air Operated Valve SYJA3000 Series

4 (R1, R2 port) 31.5 27.2 2 x 1.8 (Bleed port) 63 3 position closed center/exhaust center/pressure center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 3 4 5 01 02 2 x 4.3 (For mounting) 34 8.5 32.6 45.6 2 x M5 x 0.8 (Pilot port) B A 1 1 27 34 B A 13 3 B A 1 1 R1 R2 P 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 2 x M5 x 0.8 (Pilot port) 31.5 35 64.1

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075