MXQ

2 !3 !4 !5 !6 !7 !8 !

JXCx-OMY0006

(Circuit example) 0V 24VDC The stop is released switch Ry Stop Switch Surge suppressor Ry: Relay U Power supply plug 1 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V (4) Input power supply DC24V 0V Power supply plug 2 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V (4) Input power supply DC24V 0V Power supply plug 3 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V

Mechanically Jointed Rodless Cylinders

6 !2 !0 !7 q y @2 @3 !8 !3 @4 r o !1 !

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

JXCx-OMU0004

-6 S 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 8 14.2 B1 A1 17.7 2 1 14 18 10.2 6 A6 B6 5 B1 A1 B3 A3 2 1 5.7 15 16 L 11 30.7 11.4 [820m] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* B 15m* Shield Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 14 18 5.5 6.3 B1 A1 17.7 5 6 14.2

Compact

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

MQQ

6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Filter Regulator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD47-2-A AD47-D G G NPT AD47N-2(Z)-A NPT AD47N(-Z)-D Appearance and part No.

Modular/F.R.L. Units Series AC

Maximum operating current 324 Series AC Spacers/Brackets Accessories Spacer D Center of F.R.L. body C 1 X-X B Y200 Y400 2 X A 6 3 4 5 5 B 27 35.5 47 57 61 C 15 18.5 26 31 33 D 33 48 59 65 75 Model AC10, AC10A, AC10B AC20 AC25, AC30 AC40 AC40-06 AC50, AC55, AC60 AC50A, AC60A AC50B, AC55B, AC60B Applicable model Y100 Y200 Y300 Y400 Y500 Seal A (Spacer width) Y600 6 75.5 41 86 Part no.

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM Construction: Double

Auto Switch Guide

cap bolt G 1/2 (Applicable cable O.D. 6.8 to 9.6) OUT () Terminal no. 2 Indicator light Most sensitive position Dimensions Applicable bore size (mm) 40 50 63 80 100 Z H H HW C T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 49.5 50.5 52 53.5 56.5 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 7.5

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

ZX

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

Process Valve Series VNA

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 Note 2)4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Valve size 1 to 4 10 5 Note) Note 2)6 B: Slotted locking type B (tool required) Note 2)7 2 15 Note 2)9 3 20 Note 1) CE compliant: For D or DZ only Note 2) Semi-standard 25 4 1 1 1 2 32 5 1 4 1 2 Nil: Non-locking push type

Low Friction Cylinders Series MQ

steel Carbon tool steel Hard anodized Nickel plated Nickel plated Dimensions 4, 6 90 F M5 x 0.8 10 depth of counterbore 1.5 C M D I L B 2 x OA effective depthRA 2 x N through A 10, 16, 20 REA M5 x 0.8 F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA REB REC I C 4 x N through CY 0.2 D E CX M MQ RHC L B 0.2 M E A RZQ (mm) Bore size (mm) D Note) DM N OA OB RA RB A B C E F

Rotary Actuator

For details, refer to pages 191 to 195. 80 12.5 24 44 M16 x 2 100 14.5 30 56 M20 x 2.5 205 CVRA1 Series Construction/With Solenoid Valve Without air cushion !7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.