Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

Manifold Specifications

Rc 1/8 VZS How to Order Type 42 VFS VV5Z5 05 C6 42 1 VS4 P, R port thread type A, B port size Stations VQ7 C6 One-touch fitting for 6 C8 One-touch fitting for 8 02 2 stations 1(P) port Rc 1/4 Rc Nil G F B7 One-touch fitting for 1/4" 20 20 stations EVS N NPTF T NPT B9 One-touch fitting for 5/16" 4(A), 2(B) port 3/5(R) port Rc 1/4 C6, C8 VFN Note) For more than 8 stations, supply air to both

Table of Contents

1 !2 !3 !4 !5 !6 !7 !8 !

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 6 9 6 (b) 1 6.2.3 2 (No.PA080003) 3 ( ) 4 5 6 7 8 7.27.3 9 38 10 (c) (VG2PB09) (Hz) 2 ) (1 1 + X2 (VICPB10) (ms) 20003000 ) /(1 /1+ 6 10 6 (PG2PB08) 8 1 4 1 1 + ) (1 (PG1PB07) () 8 1 4 1 1 + ) (1 6 11 6 6.4 X-Y2 (1) (a) No. PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) No.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Note q w e Material Body Zinc die cast Body Zinc die cast Spool/Sleeve Stainless steel Spool valve Aluminum/NBR Piston Resin Piston Resin Replacement Parts Replacement Parts (1) (1) VQ111 --1 (H) (Y) Voltage1 to 6 VQ111 --1 (H) (Y) Voltage1 to 6 Pilot valve assembly Single Pilot valve assembly Single r r (1) Double/ 3 position Double/ 3 position (1) VQ131 (H) (Y) Voltage1 to 6

T/TIA

(mm) 4 4 6 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 Tubing I.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Series VS

PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN

REA/REB

6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

REA/REB

Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Usable range Usable range Usable range RHC 10 10 10 5 5 5 MK(2) RS Q G 1 1 0 2 3 4 5 6 7 8 9 101112131415 1 1 0 2 3 4 5 6 8 9 10 11 13 1 1 0 2 3 4 5 6 7 8 9 101112131415 7 12 RS H A Distance from cylinder shaft center Lo (cm) Distance

Antistatic Tubing Series TA

(mm) 3.2 4 6 8 10 12 D Tubing I.D.

AZ1000

tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 02 06 10 15 25 Code Bonnet Standard Panel installation6) FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 No code P Bonnet port (NPT 1/8 inch) BP 6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

HRX-OM-X084

1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5

Polyurethane Flat Tubing Series TFU

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 15-18-20 SMCs Global Service Network Europe Oceania/Asia AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC

REA/REB

7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

1 !4 u !0 !2 i !3 o !4 !0 !1 !5 !6 Component Parts Component Parts No.