1

16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58

Electric Actuator/Slider Type

20 40 45 50 60 Vertical 2 4 7.5 15 10 20 23 Actuator specications Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3,000 Positioning repeatability [mm] 0.02 Lead [mm] 10 5 12 6 16 8 20 10 Impact/Vibration resistance [m/s2] Note 3) 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature

Body ported manifolds for VK3000; Maximum stations: 20; Threads: Rc(PT), G(PF), NPT, NPTF; Piping method type 20: Common SUP/Common EXH; Piping method type 21: Common SUP/Individual EXH

Base mounted manifolds for VK3000; Maximum stations: 20; Threads: Rc(PT), G(PF), NPT, NPTF; Piping method: Common SUP/Common EXH

Body ported manifolds for VK3000; Maximum stations: 20; Threads: Rc(PT), G(PF), NPT, NPTF; Piping method type 20: Common SUP/Common EXH; Piping method type 21: Common SUP/Individual EXH

Base mounted manifolds for VK3000; Maximum stations: 20; Threads: Rc(PT), G(PF), NPT, NPTF; Piping method: Common SUP/Common EXH

CV/MVGQ

, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 100 110 120 90 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16

CV/MVGQ

, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

ZP

20.7 26.6 28.5 27.4 8 12 12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

MHZ

MHR Max. operating pressure (MPa) Min. bending radius (mm) MHK Operating temperature (C) Material 20 to 60 Nylon 12 20 to 60 Nylon 12 20 to 60 Polyurethane 20 to 60 Polyurethane MHS Refer to Best Pneumatics Vol. 15 regarding One-touch fittings and tubing.

MHZ

MHZ Applicable Tubing Max. 5 MHF B 5 A E2 Nylon tubing T0425 TS0425 TU0425 TCU0425B-1 coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications tubing MHL Auto switch mounting groove (Both sides) Outside diameter (mm) 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 4 0.5 20 to 60 Refer to the dimension table.

Applicable Auto Switch Model

D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 to 12 stations.

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

MG

/s (18) l = 100 mm, V = 200 m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20 Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12 12 1 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 12 12 0.5 10 20 30 31 50 100 101 200 300

ZP

S U F GN GS 20 108.5 58.5 50 20 25 36 15.5 12.5 12 30 118.5 68.5 50 163.5 88.5 75 J K ZP T F Width across flats L 2 12 3 10 99 49 16.5 20 109 59 Width across flats M 36.5 16 13 50 32 D C 12 30 119 69 50 164 89 75 Rc1/8 B01 N01 T01 A14 M14 NPT1/8 19 4 12 13 10 101.5 51.5 x 1 16.5 20 111.5 61.5 E NPTF1/8 50 40 Width across flats N F2 39 18.5 12.5 12 30 121.5 71.5 50 166.5 91.5 75 30 2.5 19

Battery-less

25 30 20 45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20

CA2

n = 4, 8, 12, 16 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 15 + 55 n = 2, 4, 6, 8 n (Same side) 2 (Different sides and same side) 120 110 100 20 90 20 + 55 n = 2, 4, 6, 8 90 + 55 (n 4) 2 n = 4, 8, 12, 16 (n 2) 2 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 D-A59W n (Same side) 120 110 100 15 90 1 2