CP95

45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50

NCA1

/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.10 5/8 27/64 2.76 1 3/8 2.34 4 1/4 2.72 8.02 1 1/2 2 7/16 2 5/8 2.40 M24x1.5 400 (4") 1 3/4

NCA1

2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2

0.4

12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

CJ5-S

20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed when shipped from factory. 10-14-14 15 Stainless Steel Cylinder Series CG5-

CJ5-S

85 131 40 Up to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 MK(2) Up to 600 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5

RQ

Hs A Auto Switch Mounting Height Proper Auto Switch Mounting Positions D-M9 D-M9V D-F9W D-F9WV D-A9V D-M9V D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 24.5 22 20 25 9.5 3 13.5 7 12.5 6 24.5 26.5 24 25 32 11 5.5 15 9.5 14 8.5 27 29 26.5 32 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 40 50 17 7 21 11 20 10 36.5 38.5 36 50 63 17 12.5 21 16.5 20

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type 31 Type S31( ) Single solenoid coil is located on same side as the A, B port.

HRX-OM-S004

-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC.

VZ3000

mounting direction 4(A), 2(B) port size B D U D side: 2 to 10 stations U side: 2 to 10 stations One-touch fitting for 4 One-touch fitting for 6 C4 Both sides: 11 to 20 stations Stations C6 SUP/EXH block mounting position 02 2 stations M Mixed DIN rail length specified In the case of mixed specifications (M), indicate separately on the manifold specification sheet. 20 20 stations Nil

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Fieldbus System

76 11 Fieldbus System Series EX600 (mm) Digital Unit EX600-DXlB EX600-DYlB EX600-DXlCl EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE 10.7 47 20 52.5 52.5 10.7 47 23 10.7 47 52.5 52.5 10.7 20 47 106 106 106 81 27 106 43.5 14.5 37 22.1 0.3 56.4 56.4 3 56.4 8 22.1 56.4 22.1 8 22.1 Analog Unit EX600-DXlF EX600-DYlF EX600-DMlF EX600-AXA EX600-AYA EX600-AMB 52.5 10.7 52.5 47 10.7 52.5 10.7 20 47

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Title not found

no.) 20 m A1 B1 (13.5) Produced upon receipt of order A6 B6 1 2 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) Connector C terminal no.

Slide Unit Series CX2/CXWM/CXWL

8 MS8-20 Manufactured by Misumi Trading Ltd.

Slide Unit Series CX2/CXWM/CXWL

8 MS8-20 Manufactured by Misumi Trading Ltd.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

ISO Standard Hydraulic Cylinder

6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54 48 18.5 13.5 15 10 20 15 12 7 48 47 48 52 51 48 46.5 46 8.5 6 12.5 10 66.5 58 18.5 15.5 15 12.5 20 17.5 12 9.5 57.5 59 57.5 62.5 63.5 58 59 57 D-A5/A6/A59W cannot be mounted to 40, 50.