-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover