C85

to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153(156.5) 127(130.5) 101(104.5) 169(172.5) 143(146.5) 117(120.5) 127(130.5) 101(104.5) 75(78.5) 182(185.5) 156(159.5) 130(133.5

C76

to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177

C76

to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177

Table of Contents

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Battery-less

15 to 100 14 20 18 36 14.5 10 101 to 200 32 40 20 to 100 14 22 18 36 18.5 10 101 to 200 L CW CU RR +0.4 +0.2 CX 0.1 0.3 CZ Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Table of Contents

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Table of Contents

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

Environment

15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

MGP

200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 Load weight m (kg)

Compact Guide Cylinder

mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more Bore size 12 7.5 7.5 10 19.5 22 4.5 2 3.5 3.5 6 23.5 26 1 16 9 7.5 10.5 19.5 22.5 4.5 1.5 5 3.5 6.5 23.5 26.5 1 20 13.5 13.5 15 25.5 27 9.5 9.5 11 29.5

Part Number Description: ASSY MANIFOLD10-STA.'   Product Line: V   Product Line Description: VALVE   Family Code: 351   Family Description: VV*FS* MANIFOLD VFS SERIES   Class Code: PM   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Series SV

) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature C

PSE530/200

Pressure Sensor/Sensor Range ZSM Sensor supply pressure 101 to 101 kPa (Compound pressure) (Vacuum) (Low pressure) (High pressure) PF2 PSE533 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor IF SET If the controller is equipped with a unit switching function, unit setting can be changed.

CV/MVGQ

Calculation: (Example) CVJ3L10-45T Single knuckle joint Basic weight 94 (g) (10-45 stroke) Double knuckle joint (With pin) Mounting bracket weight 7 (g) (Axial foot) 94 + 7 = 101 g Knuckle pin and set ring are shipped together. Accessory Manual Operation Accessories of Series CVJ3 are the same specifications as those of series CVJ5. Refer to page 10-15-9.

CV/MVGQ

Calculation: (Example) CVJ3L10-45T Single knuckle joint Basic weight 94 (g) (10-45 stroke) Double knuckle joint (With pin) Mounting bracket weight 7 (g) (Axial foot) 94 + 7 = 101 g Knuckle pin and set ring are shipped together. Accessory Manual Operation Accessories of Series CVJ3 are the same specifications as those of series CVJ5. Refer to page 10-15-9.

Made to Order

to 249 st 11 to 74 st 76 to 99 st 101 to 249 st 12 42 60.5 82.5 0 18.5 40.5 16 46 64.5 92.5 0 18.5 46.5 Bore size (mm) A E 11 to 39 st 41 to 99 st 101 to 249 st 11 to 39 st 41 to 99 st 101 to 249 st 12 43 55 84.5 1 13 42.5 16 49 65 94.5 3 19 48.5 Bore size (mm) A E 21 to 74 st 76 to 199 st 201 to 399 st 21 to 74 st 76 to 199 st 201 to 399 st 20 53 77.5 110 0 24.5 57 25 53.5 77.5 109.5 0

A

50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

HEC-OM-S008

Host ENQ 32H Check sum CR (H) (L) Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706