Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Control Unit: -, Voltage: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 4 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Control Unit: -, Voltage: -

1

Refer to the VQC series catalog (CAT.ES11-101) for mounting method.

ISO Cylinder

to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 82.5 (88.5) 94.5 (100.5) 104.5 (110.5) 10 64.5 (68.5) 82.5 (86.5) 94.5 (98.5) 104.5 (108.5) 12 70 (73.5) 95 (98.5) 111 (114.5) 125 (128.5) 16 75 (78.5) 101 (104.5) 127 (130.5) 101 (104.5) 127 (130.5) 153 (156.5) 117 (120.5) 143 (146.5) 169 (172.5) 130 (133.5

Air Cylinder

42 M5 x 0.8 4.8 9.5 M10 x 1.0 45.5 54 66 78 84 108 126 138 SA X Y Z ZA 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st Bore size D6 34.5 (

Table of Contents

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103

Air Cylinder Series CM2

With Rod Boot (mm) l Symbol h Z B3 e f Stroke 1 to 50 1 to 50 1 to 50 51 to 100 51 to 100 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size 36 18 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 20 36 18 32 72 85 97 110 135

Electric Actuator

101 to 400 20 to 100 32 31 22 18.5 40 M6 x 1.0 10 15.6 9.3 60 60 61 1 15.3 101 to 500 Note 1) Range within which the rod can move.

Air Cylinder

With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 32 36 18 72 85 97 110 135 160 185

CM2

100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 109.5 201 to 300 126 130 130 134.5 301 to 400 151 155 155 159.5 401 to 500 176 180 180 184.5 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 20

CM2

80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 20 25 32 40 109.5 134.5 Boss-cut style Built-in One-touch fitting With air cushion (mm) ZZ G 8 8 8 11 P 6 6 6 8 Q 23 26 28.5 32.5 Bore 20 25 32 40 Bore 20 25 32 40 N1 17.5 17.5 17.5 21.5 WA 13 13 13 16

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa 0 101 kPa 10.1 kPa 5 Main circuit Analog output [V] 1 k For compound pressure Black OUT 101 kPa to 101 kPa 101 kPa 101 kPa + 12 to 24 VDC For low pressure 0 to 101 kPa 0 101 kPa 10.1 kPa Load For positive pressure Blue DC () 0 to 1 MPa 0 1 MPa 0.1 MPa 1 0.6 A C B Pressure Dimensions PSE53-M5 3.4 29.4 M5 x 0.8 27.2 2.5 Pressure port 13 12 7.2 5.4 3 12 4 5 5.5 PSE53R06 R07 45.5 Pressure

CJ2

B C d H NTJ-015A 10 16 NTJ-010A 8.1 9.2 M4 x 0.7 M5 x 0.8 3.2 4 7 8 Symbol Z ZZ S Stroke Bore size (mm) 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 12 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 45.5 53 65 77 73.5 81 93 105 84.5 92 104 116 45.5 54 66

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

A_HEC-OM-K001

ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data. Host SOH UT ENQ 32H Check sum CR (H) (L) Chemical Thermo-con SOH UT STX 32H Internal sensor temp.

C85

to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153(156.5) 127(130.5) 101(104.5) 169(172.5) 143(146.5) 117(120.5) 127(130.5) 101(104.5) 75(78.5) 182(185.5) 156(159.5) 130(133.5

C85

to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153(156.5) 127(130.5) 101(104.5) 169(172.5) 143(146.5) 117(120.5) 127(130.5) 101(104.5) 75(78.5) 182(185.5) 156(159.5) 130(133.5

C76

to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177

C76

to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177

Table of Contents

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101